11/7/2011	6:23:23 AM	Main Vac valve closed
11/7/2011	6:24:00 AM	Main Vac valve opened
11/7/2011	6:25:55 AM	Tube furnace set to 50
11/7/2011	6:32:33 AM	Recipe started at 6:32 AM
11/7/2011	6:32:33 AM	Helium valve closed
11/7/2011	6:32:33 AM	H2 valve closed
11/7/2011	6:32:33 AM	BCl3 valve closed
11/7/2011	6:32:33 AM	PH3 valve closed
11/7/2011	6:32:33 AM	SiCl4 pre valve closed
11/7/2011	6:32:33 AM	SiCl4 post valve closed
11/7/2011	6:32:33 AM	Main Vac valve closed
11/7/2011	6:32:33 AM	Bypass valve closed
11/7/2011	6:32:33 AM	Bubbler valve closed
11/7/2011	6:32:33 AM	Helium MFC set to  0.000000
11/7/2011	6:32:33 AM	H2 MFC set to  0.000000
11/7/2011	6:32:33 AM	BCl3 MFC set to  0.000000
11/7/2011	6:32:33 AM	PHl3 MFC set to  0.000000
11/7/2011	6:32:33 AM	SiCl4 MFC set to  0.000000
11/7/2011	6:32:33 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	6:32:33 AM	Tube furnace set to 0
11/7/2011	6:32:36 AM	Helium valve closed
11/7/2011	6:32:36 AM	BCl3 valve closed
11/7/2011	6:32:36 AM	PH3 valve closed
11/7/2011	6:32:36 AM	SiCl4 pre valve closed
11/7/2011	6:32:36 AM	SiCl4 post valve closed
11/7/2011	6:32:36 AM	Main Vac valve closed
11/7/2011	6:32:36 AM	Bypass valve closed
11/7/2011	6:32:36 AM	Bubbler valve closed
11/7/2011	6:32:36 AM	H2 valve opened
11/7/2011	6:32:36 AM	Helium MFC set to  0.000000
11/7/2011	6:32:36 AM	H2 MFC set to  500.000000
11/7/2011	6:32:36 AM	BCl3 MFC set to  0.000000
11/7/2011	6:32:36 AM	PHl3 MFC set to  0.000000
11/7/2011	6:32:36 AM	SiCl4 MFC set to  0.000000
11/7/2011	6:32:36 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	6:32:36 AM	Tube furnace set to 100
11/7/2011	6:33:43 AM	Helium valve closed
11/7/2011	6:33:43 AM	BCl3 valve closed
11/7/2011	6:33:43 AM	PH3 valve closed
11/7/2011	6:33:43 AM	SiCl4 pre valve closed
11/7/2011	6:33:43 AM	SiCl4 post valve closed
11/7/2011	6:33:43 AM	Main Vac valve closed
11/7/2011	6:33:43 AM	Bypass valve closed
11/7/2011	6:33:43 AM	H2 valve opened
11/7/2011	6:33:43 AM	Bubbler valve opened
11/7/2011	6:33:43 AM	Helium MFC set to  0.000000
11/7/2011	6:33:43 AM	H2 MFC set to  500.000000
11/7/2011	6:33:43 AM	BCl3 MFC set to  0.000000
11/7/2011	6:33:43 AM	PHl3 MFC set to  0.000000
11/7/2011	6:33:43 AM	SiCl4 MFC set to  0.000000
11/7/2011	6:33:43 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	6:33:44 AM	Tube furnace set to 1005
11/7/2011	6:33:45 AM	Helium valve closed
11/7/2011	6:33:45 AM	BCl3 valve closed
11/7/2011	6:33:45 AM	PH3 valve closed
11/7/2011	6:33:45 AM	SiCl4 pre valve closed
11/7/2011	6:33:45 AM	SiCl4 post valve closed
11/7/2011	6:33:45 AM	Main Vac valve closed
11/7/2011	6:33:45 AM	Bypass valve closed
11/7/2011	6:33:45 AM	H2 valve opened
11/7/2011	6:33:45 AM	Bubbler valve opened
11/7/2011	6:33:45 AM	Helium MFC set to  0.000000
11/7/2011	6:33:45 AM	H2 MFC set to  450.000000
11/7/2011	6:33:45 AM	BCl3 MFC set to  0.000000
11/7/2011	6:33:45 AM	PHl3 MFC set to  0.000000
11/7/2011	6:33:45 AM	SiCl4 MFC set to  0.000000
11/7/2011	6:33:45 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	6:33:45 AM	Tube furnace set to 1010
11/7/2011	6:57:45 AM	Helium valve closed
11/7/2011	6:57:45 AM	PH3 valve closed
11/7/2011	6:57:45 AM	Main Vac valve closed
11/7/2011	6:57:45 AM	Bypass valve closed
11/7/2011	6:57:45 AM	H2 valve opened
11/7/2011	6:57:45 AM	BCl3 valve opened
11/7/2011	6:57:45 AM	SiCl4 pre valve opened
11/7/2011	6:57:45 AM	SiCl4 post valve opened
11/7/2011	6:57:45 AM	Bubbler valve opened
11/7/2011	6:57:45 AM	Helium MFC set to  0.000000
11/7/2011	6:57:45 AM	H2 MFC set to  496.000000
11/7/2011	6:57:45 AM	BCl3 MFC set to  1.800000
11/7/2011	6:57:45 AM	PHl3 MFC set to  0.000000
11/7/2011	6:57:45 AM	SiCl4 MFC set to  24.000000
11/7/2011	6:57:45 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	6:57:45 AM	Tube furnace set to 1010
11/7/2011	7:17:45 AM	Helium valve closed
11/7/2011	7:17:45 AM	BCl3 valve closed
11/7/2011	7:17:45 AM	PH3 valve closed
11/7/2011	7:17:45 AM	SiCl4 pre valve closed
11/7/2011	7:17:45 AM	SiCl4 post valve closed
11/7/2011	7:17:45 AM	Main Vac valve closed
11/7/2011	7:17:45 AM	Bypass valve closed
11/7/2011	7:17:45 AM	H2 valve opened
11/7/2011	7:17:45 AM	Bubbler valve opened
11/7/2011	7:17:45 AM	Helium MFC set to  0.000000
11/7/2011	7:17:45 AM	H2 MFC set to  450.000000
11/7/2011	7:17:45 AM	BCl3 MFC set to  0.000000
11/7/2011	7:17:45 AM	PHl3 MFC set to  0.000000
11/7/2011	7:17:45 AM	SiCl4 MFC set to  0.000000
11/7/2011	7:17:45 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	7:17:45 AM	Tube furnace set to 650
11/7/2011	7:27:45 AM	H2 valve closed
11/7/2011	7:27:45 AM	BCl3 valve closed
11/7/2011	7:27:45 AM	PH3 valve closed
11/7/2011	7:27:45 AM	SiCl4 pre valve closed
11/7/2011	7:27:45 AM	SiCl4 post valve closed
11/7/2011	7:27:45 AM	Main Vac valve closed
11/7/2011	7:27:45 AM	Bypass valve closed
11/7/2011	7:27:45 AM	Helium valve opened
11/7/2011	7:27:45 AM	Bubbler valve opened
11/7/2011	7:27:45 AM	Helium MFC set to  400.000000
11/7/2011	7:27:45 AM	H2 MFC set to  0.000000
11/7/2011	7:27:45 AM	BCl3 MFC set to  0.000000
11/7/2011	7:27:45 AM	PHl3 MFC set to  0.000000
11/7/2011	7:27:45 AM	SiCl4 MFC set to  0.000000
11/7/2011	7:27:45 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	7:27:45 AM	Tube furnace set to 0
11/7/2011	7:57:45 AM	Helium valve closed
11/7/2011	7:57:45 AM	H2 valve closed
11/7/2011	7:57:45 AM	BCl3 valve closed
11/7/2011	7:57:45 AM	PH3 valve closed
11/7/2011	7:57:45 AM	SiCl4 pre valve closed
11/7/2011	7:57:45 AM	SiCl4 post valve closed
11/7/2011	7:57:45 AM	Main Vac valve closed
11/7/2011	7:57:45 AM	Bypass valve closed
11/7/2011	7:57:45 AM	Bubbler valve closed
11/7/2011	7:57:45 AM	Helium MFC set to  0.000000
11/7/2011	7:57:45 AM	H2 MFC set to  0.000000
11/7/2011	7:57:45 AM	BCl3 MFC set to  0.000000
11/7/2011	7:57:45 AM	PHl3 MFC set to  0.000000
11/7/2011	7:57:45 AM	SiCl4 MFC set to  0.000000
11/7/2011	7:57:45 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	7:57:45 AM	Tube furnace set to 0
11/7/2011	7:58:02 AM	Run aborted at 7:58 AM
11/7/2011	7:58:02 AM	Helium valve closed
11/7/2011	7:58:02 AM	H2 valve closed
11/7/2011	7:58:02 AM	BCl3 valve closed
11/7/2011	7:58:02 AM	PH3 valve closed
11/7/2011	7:58:02 AM	SiCl4 pre valve closed
11/7/2011	7:58:02 AM	SiCl4 post valve closed
11/7/2011	7:58:02 AM	Bypass valve closed
11/7/2011	7:58:02 AM	Main Vac valve closed
11/7/2011	7:58:02 AM	Bubbler valve closed
11/7/2011	7:58:02 AM	Helium MFC set to  0.000000
11/7/2011	7:58:02 AM	H2 MFC set to  0.000000
11/7/2011	7:58:02 AM	BCl3 MFC set to  0.000000
11/7/2011	7:58:02 AM	PHl3 MFC set to  0.000000
11/7/2011	7:58:02 AM	SiCl4 MFC set to  0.000000
11/7/2011	7:58:03 AM	Tube furnace set to 0
11/7/2011	8:02:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/7/2011	8:02:29 AM	Recipe started at 8:02 AM
11/7/2011	8:02:29 AM	Helium valve closed
11/7/2011	8:02:29 AM	H2 valve closed
11/7/2011	8:02:29 AM	BCl3 valve closed
11/7/2011	8:02:29 AM	PH3 valve closed
11/7/2011	8:02:29 AM	SiCl4 pre valve closed
11/7/2011	8:02:29 AM	SiCl4 post valve closed
11/7/2011	8:02:29 AM	Main Vac valve closed
11/7/2011	8:02:29 AM	Bubbler valve closed
11/7/2011	8:02:29 AM	Bypass valve opened
11/7/2011	8:02:29 AM	Helium MFC set to  0.000000
11/7/2011	8:02:29 AM	H2 MFC set to  0.000000
11/7/2011	8:02:29 AM	BCl3 MFC set to  0.000000
11/7/2011	8:02:29 AM	PHl3 MFC set to  0.000000
11/7/2011	8:02:29 AM	SiCl4 MFC set to  0.000000
11/7/2011	8:02:29 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	8:02:29 AM	Tube furnace set to 0
11/7/2011	8:03:37 AM	Helium valve closed
11/7/2011	8:03:37 AM	H2 valve closed
11/7/2011	8:03:37 AM	BCl3 valve closed
11/7/2011	8:03:37 AM	PH3 valve closed
11/7/2011	8:03:37 AM	SiCl4 pre valve closed
11/7/2011	8:03:37 AM	SiCl4 post valve closed
11/7/2011	8:03:37 AM	Main Vac valve closed
11/7/2011	8:03:37 AM	Bubbler valve closed
11/7/2011	8:03:37 AM	Bypass valve opened
11/7/2011	8:03:37 AM	Helium MFC set to  0.000000
11/7/2011	8:03:37 AM	H2 MFC set to  0.000000
11/7/2011	8:03:37 AM	BCl3 MFC set to  0.000000
11/7/2011	8:03:37 AM	PHl3 MFC set to  0.000000
11/7/2011	8:03:37 AM	SiCl4 MFC set to  0.000000
11/7/2011	8:03:37 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	8:03:37 AM	Tube furnace set to 0
11/7/2011	8:04:37 AM	Helium valve closed
11/7/2011	8:04:37 AM	H2 valve closed
11/7/2011	8:04:37 AM	BCl3 valve closed
11/7/2011	8:04:37 AM	PH3 valve closed
11/7/2011	8:04:37 AM	SiCl4 pre valve closed
11/7/2011	8:04:37 AM	SiCl4 post valve closed
11/7/2011	8:04:37 AM	Bypass valve closed
11/7/2011	8:04:37 AM	Bubbler valve closed
11/7/2011	8:04:37 AM	Main Vac valve opened
11/7/2011	8:04:37 AM	Helium MFC set to  0.000000
11/7/2011	8:04:37 AM	H2 MFC set to  0.000000
11/7/2011	8:04:37 AM	BCl3 MFC set to  0.000000
11/7/2011	8:04:37 AM	PHl3 MFC set to  0.000000
11/7/2011	8:04:37 AM	SiCl4 MFC set to  0.000000
11/7/2011	8:04:37 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	8:04:37 AM	Tube furnace set to 0
11/7/2011	8:04:38 AM	Run finished at 8:04 AM
11/7/2011	8:04:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/7/2011	8:20:21 AM	Helium MFC set to  20.000000
11/7/2011	8:20:22 AM	Helium valve opened
11/7/2011	8:21:33 AM	Helium valve closed
11/7/2011	8:21:36 AM	Helium MFC set to  0.000000
11/7/2011	8:21:47 AM	Main Vac valve closed
11/7/2011	8:21:59 AM	Main Vac valve opened
11/7/2011	8:36:34 AM	Main Vac valve closed
11/7/2011	8:36:59 AM	Main Vac valve opened
11/7/2011	8:37:03 AM	Helium MFC set to  20.000000
11/7/2011	8:37:04 AM	Helium valve opened
11/7/2011	8:37:51 AM	Helium valve closed
11/7/2011	9:05:05 AM	Main Vac valve closed
11/7/2011	9:05:28 AM	Main Vac valve opened
11/7/2011	9:05:30 AM	Helium valve opened
11/7/2011	9:06:43 AM	Helium valve closed
11/7/2011	9:07:28 AM	Tube furnace set to 50
11/7/2011	9:08:05 AM	Main Vac valve closed
11/7/2011	9:08:09 AM	Helium MFC set to  0.000000
11/7/2011	9:08:27 AM	Main Vac valve opened
11/7/2011	9:09:11 AM	Recipe started at 9:09 AM
11/7/2011	9:09:11 AM	Helium valve closed
11/7/2011	9:09:11 AM	H2 valve closed
11/7/2011	9:09:11 AM	BCl3 valve closed
11/7/2011	9:09:11 AM	PH3 valve closed
11/7/2011	9:09:11 AM	SiCl4 pre valve closed
11/7/2011	9:09:11 AM	SiCl4 post valve closed
11/7/2011	9:09:11 AM	Main Vac valve closed
11/7/2011	9:09:11 AM	Bypass valve closed
11/7/2011	9:09:11 AM	Bubbler valve closed
11/7/2011	9:09:11 AM	Helium MFC set to  0.000000
11/7/2011	9:09:11 AM	H2 MFC set to  0.000000
11/7/2011	9:09:11 AM	BCl3 MFC set to  0.000000
11/7/2011	9:09:11 AM	PHl3 MFC set to  0.000000
11/7/2011	9:09:11 AM	SiCl4 MFC set to  0.000000
11/7/2011	9:09:11 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	9:09:11 AM	Tube furnace set to 0
11/7/2011	9:09:14 AM	Helium valve closed
11/7/2011	9:09:14 AM	BCl3 valve closed
11/7/2011	9:09:14 AM	PH3 valve closed
11/7/2011	9:09:14 AM	SiCl4 pre valve closed
11/7/2011	9:09:14 AM	SiCl4 post valve closed
11/7/2011	9:09:14 AM	Main Vac valve closed
11/7/2011	9:09:14 AM	Bypass valve closed
11/7/2011	9:09:14 AM	Bubbler valve closed
11/7/2011	9:09:14 AM	H2 valve opened
11/7/2011	9:09:14 AM	Helium MFC set to  0.000000
11/7/2011	9:09:14 AM	H2 MFC set to  500.000000
11/7/2011	9:09:14 AM	BCl3 MFC set to  0.000000
11/7/2011	9:09:14 AM	PHl3 MFC set to  0.000000
11/7/2011	9:09:14 AM	SiCl4 MFC set to  0.000000
11/7/2011	9:09:14 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	9:09:14 AM	Tube furnace set to 100
11/7/2011	9:10:20 AM	Helium valve closed
11/7/2011	9:10:20 AM	BCl3 valve closed
11/7/2011	9:10:20 AM	PH3 valve closed
11/7/2011	9:10:20 AM	SiCl4 pre valve closed
11/7/2011	9:10:20 AM	SiCl4 post valve closed
11/7/2011	9:10:20 AM	Main Vac valve closed
11/7/2011	9:10:20 AM	Bypass valve closed
11/7/2011	9:10:20 AM	H2 valve opened
11/7/2011	9:10:20 AM	Bubbler valve opened
11/7/2011	9:10:20 AM	Helium MFC set to  0.000000
11/7/2011	9:10:20 AM	H2 MFC set to  500.000000
11/7/2011	9:10:20 AM	BCl3 MFC set to  0.000000
11/7/2011	9:10:20 AM	PHl3 MFC set to  0.000000
11/7/2011	9:10:20 AM	SiCl4 MFC set to  0.000000
11/7/2011	9:10:20 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	9:10:20 AM	Tube furnace set to 1005
11/7/2011	9:10:21 AM	Helium valve closed
11/7/2011	9:10:21 AM	BCl3 valve closed
11/7/2011	9:10:21 AM	PH3 valve closed
11/7/2011	9:10:21 AM	SiCl4 pre valve closed
11/7/2011	9:10:21 AM	SiCl4 post valve closed
11/7/2011	9:10:21 AM	Main Vac valve closed
11/7/2011	9:10:21 AM	Bypass valve closed
11/7/2011	9:10:21 AM	H2 valve opened
11/7/2011	9:10:21 AM	Bubbler valve opened
11/7/2011	9:10:21 AM	Helium MFC set to  0.000000
11/7/2011	9:10:21 AM	H2 MFC set to  500.000000
11/7/2011	9:10:21 AM	BCl3 MFC set to  0.000000
11/7/2011	9:10:21 AM	PHl3 MFC set to  0.000000
11/7/2011	9:10:21 AM	SiCl4 MFC set to  0.000000
11/7/2011	9:10:21 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	9:10:21 AM	Tube furnace set to 1010
11/7/2011	9:34:21 AM	Helium valve closed
11/7/2011	9:34:21 AM	BCl3 valve closed
11/7/2011	9:34:21 AM	PH3 valve closed
11/7/2011	9:34:21 AM	Main Vac valve closed
11/7/2011	9:34:21 AM	Bypass valve closed
11/7/2011	9:34:21 AM	H2 valve opened
11/7/2011	9:34:21 AM	SiCl4 pre valve opened
11/7/2011	9:34:21 AM	SiCl4 post valve opened
11/7/2011	9:34:21 AM	Bubbler valve opened
11/7/2011	9:34:21 AM	Helium MFC set to  0.000000
11/7/2011	9:34:21 AM	H2 MFC set to  496.000000
11/7/2011	9:34:21 AM	BCl3 MFC set to  0.000000
11/7/2011	9:34:21 AM	PHl3 MFC set to  0.000000
11/7/2011	9:34:21 AM	SiCl4 MFC set to  24.000000
11/7/2011	9:34:21 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	9:34:21 AM	Tube furnace set to 1010
11/7/2011	9:54:21 AM	Helium valve closed
11/7/2011	9:54:21 AM	BCl3 valve closed
11/7/2011	9:54:21 AM	PH3 valve closed
11/7/2011	9:54:21 AM	SiCl4 pre valve closed
11/7/2011	9:54:21 AM	SiCl4 post valve closed
11/7/2011	9:54:21 AM	Main Vac valve closed
11/7/2011	9:54:21 AM	Bypass valve closed
11/7/2011	9:54:21 AM	H2 valve opened
11/7/2011	9:54:21 AM	Bubbler valve opened
11/7/2011	9:54:21 AM	Helium MFC set to  0.000000
11/7/2011	9:54:21 AM	H2 MFC set to  450.000000
11/7/2011	9:54:21 AM	BCl3 MFC set to  0.000000
11/7/2011	9:54:21 AM	PHl3 MFC set to  0.000000
11/7/2011	9:54:21 AM	SiCl4 MFC set to  0.000000
11/7/2011	9:54:21 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	9:54:21 AM	Tube furnace set to 650
11/7/2011	10:04:21 AM	H2 valve closed
11/7/2011	10:04:21 AM	BCl3 valve closed
11/7/2011	10:04:21 AM	PH3 valve closed
11/7/2011	10:04:21 AM	SiCl4 pre valve closed
11/7/2011	10:04:21 AM	SiCl4 post valve closed
11/7/2011	10:04:21 AM	Main Vac valve closed
11/7/2011	10:04:21 AM	Bypass valve closed
11/7/2011	10:04:21 AM	Helium valve opened
11/7/2011	10:04:21 AM	Bubbler valve opened
11/7/2011	10:04:21 AM	Helium MFC set to  400.000000
11/7/2011	10:04:21 AM	H2 MFC set to  0.000000
11/7/2011	10:04:21 AM	BCl3 MFC set to  0.000000
11/7/2011	10:04:21 AM	PHl3 MFC set to  0.000000
11/7/2011	10:04:21 AM	SiCl4 MFC set to  0.000000
11/7/2011	10:04:21 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	10:04:21 AM	Tube furnace set to 0
11/7/2011	10:14:46 AM	Helium valve closed
11/7/2011	10:14:46 AM	H2 valve closed
11/7/2011	10:14:46 AM	BCl3 valve closed
11/7/2011	10:14:46 AM	PH3 valve closed
11/7/2011	10:14:46 AM	SiCl4 pre valve closed
11/7/2011	10:14:46 AM	SiCl4 post valve closed
11/7/2011	10:14:46 AM	Main Vac valve closed
11/7/2011	10:14:46 AM	Bypass valve closed
11/7/2011	10:14:46 AM	Bubbler valve closed
11/7/2011	10:14:46 AM	Helium MFC set to  0.000000
11/7/2011	10:14:46 AM	H2 MFC set to  0.000000
11/7/2011	10:14:46 AM	BCl3 MFC set to  0.000000
11/7/2011	10:14:46 AM	PHl3 MFC set to  0.000000
11/7/2011	10:14:46 AM	SiCl4 MFC set to  0.000000
11/7/2011	10:14:46 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	10:14:47 AM	Tube furnace set to 0
11/7/2011	10:16:40 AM	Helium valve closed
11/7/2011	10:16:40 AM	H2 valve closed
11/7/2011	10:16:40 AM	BCl3 valve closed
11/7/2011	10:16:40 AM	PH3 valve closed
11/7/2011	10:16:40 AM	SiCl4 pre valve closed
11/7/2011	10:16:40 AM	SiCl4 post valve closed
11/7/2011	10:16:40 AM	Main Vac valve closed
11/7/2011	10:16:40 AM	Bubbler valve closed
11/7/2011	10:16:40 AM	Bypass valve opened
11/7/2011	10:16:40 AM	Helium MFC set to  0.000000
11/7/2011	10:16:40 AM	H2 MFC set to  0.000000
11/7/2011	10:16:40 AM	BCl3 MFC set to  0.000000
11/7/2011	10:16:40 AM	PHl3 MFC set to  0.000000
11/7/2011	10:16:40 AM	SiCl4 MFC set to  0.000000
11/7/2011	10:16:40 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	10:16:40 AM	Tube furnace set to 0
11/7/2011	10:18:40 AM	Helium valve closed
11/7/2011	10:18:40 AM	H2 valve closed
11/7/2011	10:18:40 AM	BCl3 valve closed
11/7/2011	10:18:40 AM	PH3 valve closed
11/7/2011	10:18:40 AM	SiCl4 pre valve closed
11/7/2011	10:18:40 AM	SiCl4 post valve closed
11/7/2011	10:18:40 AM	Main Vac valve closed
11/7/2011	10:18:40 AM	Bypass valve closed
11/7/2011	10:18:40 AM	Bubbler valve closed
11/7/2011	10:18:40 AM	Helium MFC set to  0.000000
11/7/2011	10:18:40 AM	H2 MFC set to  0.000000
11/7/2011	10:18:40 AM	BCl3 MFC set to  0.000000
11/7/2011	10:18:40 AM	PHl3 MFC set to  0.000000
11/7/2011	10:18:40 AM	SiCl4 MFC set to  0.000000
11/7/2011	10:18:40 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	10:18:40 AM	Tube furnace set to 0
11/7/2011	10:18:41 AM	Run finished at 10:18 AM
11/7/2011	10:58:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/7/2011	10:58:48 AM	Recipe started at 10:58 AM
11/7/2011	10:58:48 AM	Helium valve closed
11/7/2011	10:58:48 AM	H2 valve closed
11/7/2011	10:58:48 AM	BCl3 valve closed
11/7/2011	10:58:48 AM	PH3 valve closed
11/7/2011	10:58:48 AM	SiCl4 pre valve closed
11/7/2011	10:58:48 AM	SiCl4 post valve closed
11/7/2011	10:58:48 AM	Main Vac valve closed
11/7/2011	10:58:48 AM	Bypass valve closed
11/7/2011	10:58:48 AM	Bubbler valve closed
11/7/2011	10:58:48 AM	Helium MFC set to  0.000000
11/7/2011	10:58:48 AM	H2 MFC set to  0.000000
11/7/2011	10:58:48 AM	BCl3 MFC set to  0.000000
11/7/2011	10:58:48 AM	PHl3 MFC set to  0.000000
11/7/2011	10:58:48 AM	SiCl4 MFC set to  0.000000
11/7/2011	10:58:48 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	10:58:48 AM	Tube furnace set to 0
11/7/2011	10:58:51 AM	H2 valve closed
11/7/2011	10:58:51 AM	BCl3 valve closed
11/7/2011	10:58:51 AM	PH3 valve closed
11/7/2011	10:58:51 AM	SiCl4 pre valve closed
11/7/2011	10:58:51 AM	SiCl4 post valve closed
11/7/2011	10:58:51 AM	Main Vac valve closed
11/7/2011	10:58:51 AM	Bypass valve closed
11/7/2011	10:58:51 AM	Bubbler valve closed
11/7/2011	10:58:51 AM	Helium valve opened
11/7/2011	10:58:51 AM	Helium MFC set to  500.000000
11/7/2011	10:58:51 AM	H2 MFC set to  0.000000
11/7/2011	10:58:51 AM	BCl3 MFC set to  0.000000
11/7/2011	10:58:51 AM	PHl3 MFC set to  0.000000
11/7/2011	10:58:51 AM	SiCl4 MFC set to  0.000000
11/7/2011	10:58:51 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	10:58:51 AM	Tube furnace set to 0
11/7/2011	10:59:57 AM	Helium valve closed
11/7/2011	10:59:57 AM	H2 valve closed
11/7/2011	10:59:57 AM	BCl3 valve closed
11/7/2011	10:59:57 AM	PH3 valve closed
11/7/2011	10:59:57 AM	SiCl4 pre valve closed
11/7/2011	10:59:57 AM	SiCl4 post valve closed
11/7/2011	10:59:57 AM	Main Vac valve closed
11/7/2011	10:59:57 AM	Bypass valve closed
11/7/2011	10:59:57 AM	Bubbler valve closed
11/7/2011	10:59:57 AM	Helium MFC set to  0.000000
11/7/2011	10:59:57 AM	H2 MFC set to  0.000000
11/7/2011	10:59:57 AM	BCl3 MFC set to  0.000000
11/7/2011	10:59:57 AM	PHl3 MFC set to  0.000000
11/7/2011	10:59:57 AM	SiCl4 MFC set to  0.000000
11/7/2011	10:59:57 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	10:59:57 AM	Tube furnace set to 0
11/7/2011	10:59:58 AM	Run finished at 10:59 AM
11/7/2011	10:59:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/7/2011	11:03:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/7/2011	11:03:17 AM	Recipe started at 11:03 AM
11/7/2011	11:03:17 AM	Helium valve closed
11/7/2011	11:03:17 AM	H2 valve closed
11/7/2011	11:03:17 AM	BCl3 valve closed
11/7/2011	11:03:17 AM	PH3 valve closed
11/7/2011	11:03:17 AM	SiCl4 pre valve closed
11/7/2011	11:03:17 AM	SiCl4 post valve closed
11/7/2011	11:03:17 AM	Main Vac valve closed
11/7/2011	11:03:17 AM	Bubbler valve closed
11/7/2011	11:03:17 AM	Bypass valve opened
11/7/2011	11:03:17 AM	Helium MFC set to  0.000000
11/7/2011	11:03:17 AM	H2 MFC set to  0.000000
11/7/2011	11:03:17 AM	BCl3 MFC set to  0.000000
11/7/2011	11:03:17 AM	PHl3 MFC set to  0.000000
11/7/2011	11:03:17 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:03:17 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:03:17 AM	Tube furnace set to 0
11/7/2011	11:04:24 AM	Helium valve closed
11/7/2011	11:04:24 AM	H2 valve closed
11/7/2011	11:04:24 AM	BCl3 valve closed
11/7/2011	11:04:24 AM	PH3 valve closed
11/7/2011	11:04:24 AM	SiCl4 pre valve closed
11/7/2011	11:04:24 AM	SiCl4 post valve closed
11/7/2011	11:04:24 AM	Main Vac valve closed
11/7/2011	11:04:24 AM	Bubbler valve closed
11/7/2011	11:04:24 AM	Bypass valve opened
11/7/2011	11:04:24 AM	Helium MFC set to  0.000000
11/7/2011	11:04:24 AM	H2 MFC set to  0.000000
11/7/2011	11:04:24 AM	BCl3 MFC set to  0.000000
11/7/2011	11:04:24 AM	PHl3 MFC set to  0.000000
11/7/2011	11:04:24 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:04:24 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:04:24 AM	Tube furnace set to 0
11/7/2011	11:05:24 AM	Helium valve closed
11/7/2011	11:05:24 AM	H2 valve closed
11/7/2011	11:05:24 AM	BCl3 valve closed
11/7/2011	11:05:24 AM	PH3 valve closed
11/7/2011	11:05:24 AM	SiCl4 pre valve closed
11/7/2011	11:05:24 AM	SiCl4 post valve closed
11/7/2011	11:05:24 AM	Bypass valve closed
11/7/2011	11:05:24 AM	Bubbler valve closed
11/7/2011	11:05:24 AM	Main Vac valve opened
11/7/2011	11:05:24 AM	Helium MFC set to  0.000000
11/7/2011	11:05:24 AM	H2 MFC set to  0.000000
11/7/2011	11:05:24 AM	BCl3 MFC set to  0.000000
11/7/2011	11:05:24 AM	PHl3 MFC set to  0.000000
11/7/2011	11:05:24 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:05:24 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:05:25 AM	Tube furnace set to 0
11/7/2011	11:05:26 AM	Run finished at 11:05 AM
11/7/2011	11:05:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/7/2011	11:33:25 AM	Recipe started at 11:33 AM
11/7/2011	11:33:25 AM	Helium valve closed
11/7/2011	11:33:25 AM	H2 valve closed
11/7/2011	11:33:25 AM	BCl3 valve closed
11/7/2011	11:33:25 AM	PH3 valve closed
11/7/2011	11:33:25 AM	SiCl4 pre valve closed
11/7/2011	11:33:25 AM	SiCl4 post valve closed
11/7/2011	11:33:25 AM	Main Vac valve closed
11/7/2011	11:33:25 AM	Bubbler valve closed
11/7/2011	11:33:25 AM	Bypass valve opened
11/7/2011	11:33:25 AM	Helium MFC set to  0.000000
11/7/2011	11:33:25 AM	H2 MFC set to  0.000000
11/7/2011	11:33:25 AM	BCl3 MFC set to  0.000000
11/7/2011	11:33:25 AM	PHl3 MFC set to  0.000000
11/7/2011	11:33:25 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:33:25 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:33:25 AM	Tube furnace set to 180
11/7/2011	11:33:25 AM	Helium valve closed
11/7/2011	11:33:25 AM	H2 valve closed
11/7/2011	11:33:25 AM	BCl3 valve closed
11/7/2011	11:33:25 AM	PH3 valve closed
11/7/2011	11:33:25 AM	SiCl4 pre valve closed
11/7/2011	11:33:25 AM	SiCl4 post valve closed
11/7/2011	11:33:25 AM	Main Vac valve closed
11/7/2011	11:33:25 AM	Bubbler valve closed
11/7/2011	11:33:25 AM	Bypass valve opened
11/7/2011	11:33:25 AM	Helium MFC set to  0.000000
11/7/2011	11:33:25 AM	H2 MFC set to  0.000000
11/7/2011	11:33:25 AM	BCl3 MFC set to  0.000000
11/7/2011	11:33:25 AM	PHl3 MFC set to  0.000000
11/7/2011	11:33:25 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:33:25 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:33:25 AM	Tube furnace set to 150
11/7/2011	11:33:49 AM	Helium valve closed
11/7/2011	11:33:49 AM	H2 valve closed
11/7/2011	11:33:49 AM	BCl3 valve closed
11/7/2011	11:33:49 AM	PH3 valve closed
11/7/2011	11:33:49 AM	SiCl4 pre valve closed
11/7/2011	11:33:49 AM	SiCl4 post valve closed
11/7/2011	11:33:49 AM	Bypass valve closed
11/7/2011	11:33:49 AM	Bubbler valve closed
11/7/2011	11:33:49 AM	Main Vac valve opened
11/7/2011	11:33:49 AM	Helium MFC set to  0.000000
11/7/2011	11:33:49 AM	H2 MFC set to  0.000000
11/7/2011	11:33:49 AM	BCl3 MFC set to  0.000000
11/7/2011	11:33:49 AM	PHl3 MFC set to  0.000000
11/7/2011	11:33:49 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:33:49 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:33:49 AM	Tube furnace set to 180
11/7/2011	11:34:19 AM	H2 valve closed
11/7/2011	11:34:19 AM	BCl3 valve closed
11/7/2011	11:34:19 AM	PH3 valve closed
11/7/2011	11:34:19 AM	SiCl4 pre valve closed
11/7/2011	11:34:19 AM	SiCl4 post valve closed
11/7/2011	11:34:19 AM	Bypass valve closed
11/7/2011	11:34:19 AM	Bubbler valve closed
11/7/2011	11:34:19 AM	Helium valve opened
11/7/2011	11:34:19 AM	Main Vac valve opened
11/7/2011	11:34:19 AM	Helium MFC set to  20.000000
11/7/2011	11:34:19 AM	H2 MFC set to  0.000000
11/7/2011	11:34:19 AM	BCl3 MFC set to  0.000000
11/7/2011	11:34:19 AM	PHl3 MFC set to  0.000000
11/7/2011	11:34:19 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:34:19 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:34:20 AM	Tube furnace set to 180
11/7/2011	11:34:50 AM	Helium valve closed
11/7/2011	11:34:50 AM	H2 valve closed
11/7/2011	11:34:50 AM	BCl3 valve closed
11/7/2011	11:34:50 AM	PH3 valve closed
11/7/2011	11:34:50 AM	SiCl4 pre valve closed
11/7/2011	11:34:50 AM	SiCl4 post valve closed
11/7/2011	11:34:50 AM	Bypass valve closed
11/7/2011	11:34:50 AM	Bubbler valve closed
11/7/2011	11:34:50 AM	Main Vac valve opened
11/7/2011	11:34:50 AM	Helium MFC set to  0.000000
11/7/2011	11:34:50 AM	H2 MFC set to  0.000000
11/7/2011	11:34:50 AM	BCl3 MFC set to  0.000000
11/7/2011	11:34:50 AM	PHl3 MFC set to  0.000000
11/7/2011	11:34:50 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:34:50 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:34:50 AM	Tube furnace set to 150
11/7/2011	11:35:20 AM	H2 valve closed
11/7/2011	11:35:20 AM	BCl3 valve closed
11/7/2011	11:35:20 AM	PH3 valve closed
11/7/2011	11:35:20 AM	SiCl4 pre valve closed
11/7/2011	11:35:20 AM	SiCl4 post valve closed
11/7/2011	11:35:20 AM	Bypass valve closed
11/7/2011	11:35:20 AM	Bubbler valve closed
11/7/2011	11:35:20 AM	Helium valve opened
11/7/2011	11:35:20 AM	Main Vac valve opened
11/7/2011	11:35:20 AM	Helium MFC set to  20.000000
11/7/2011	11:35:20 AM	H2 MFC set to  0.000000
11/7/2011	11:35:20 AM	BCl3 MFC set to  0.000000
11/7/2011	11:35:20 AM	PHl3 MFC set to  0.000000
11/7/2011	11:35:20 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:35:20 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:35:20 AM	Tube furnace set to 180
11/7/2011	11:35:50 AM	Helium valve closed
11/7/2011	11:35:50 AM	H2 valve closed
11/7/2011	11:35:50 AM	BCl3 valve closed
11/7/2011	11:35:50 AM	PH3 valve closed
11/7/2011	11:35:50 AM	SiCl4 pre valve closed
11/7/2011	11:35:50 AM	SiCl4 post valve closed
11/7/2011	11:35:50 AM	Bypass valve closed
11/7/2011	11:35:50 AM	Bubbler valve closed
11/7/2011	11:35:50 AM	Main Vac valve opened
11/7/2011	11:35:50 AM	Helium MFC set to  0.000000
11/7/2011	11:35:50 AM	H2 MFC set to  0.000000
11/7/2011	11:35:50 AM	BCl3 MFC set to  0.000000
11/7/2011	11:35:50 AM	PHl3 MFC set to  0.000000
11/7/2011	11:35:50 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:35:50 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:35:50 AM	Tube furnace set to 150
11/7/2011	11:36:20 AM	H2 valve closed
11/7/2011	11:36:20 AM	BCl3 valve closed
11/7/2011	11:36:20 AM	PH3 valve closed
11/7/2011	11:36:20 AM	SiCl4 pre valve closed
11/7/2011	11:36:20 AM	SiCl4 post valve closed
11/7/2011	11:36:20 AM	Bypass valve closed
11/7/2011	11:36:20 AM	Bubbler valve closed
11/7/2011	11:36:20 AM	Helium valve opened
11/7/2011	11:36:20 AM	Main Vac valve opened
11/7/2011	11:36:20 AM	Helium MFC set to  20.000000
11/7/2011	11:36:20 AM	H2 MFC set to  0.000000
11/7/2011	11:36:20 AM	BCl3 MFC set to  0.000000
11/7/2011	11:36:20 AM	PHl3 MFC set to  0.000000
11/7/2011	11:36:20 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:36:20 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:36:20 AM	Tube furnace set to 150
11/7/2011	11:36:50 AM	Helium valve closed
11/7/2011	11:36:50 AM	H2 valve closed
11/7/2011	11:36:50 AM	BCl3 valve closed
11/7/2011	11:36:50 AM	PH3 valve closed
11/7/2011	11:36:50 AM	SiCl4 pre valve closed
11/7/2011	11:36:50 AM	SiCl4 post valve closed
11/7/2011	11:36:50 AM	Bypass valve closed
11/7/2011	11:36:50 AM	Bubbler valve closed
11/7/2011	11:36:50 AM	Main Vac valve opened
11/7/2011	11:36:50 AM	Helium MFC set to  0.000000
11/7/2011	11:36:50 AM	H2 MFC set to  0.000000
11/7/2011	11:36:50 AM	BCl3 MFC set to  0.000000
11/7/2011	11:36:50 AM	PHl3 MFC set to  0.000000
11/7/2011	11:36:50 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:36:50 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:36:51 AM	Tube furnace set to 150
11/7/2011	11:37:21 AM	H2 valve closed
11/7/2011	11:37:21 AM	BCl3 valve closed
11/7/2011	11:37:21 AM	PH3 valve closed
11/7/2011	11:37:21 AM	SiCl4 pre valve closed
11/7/2011	11:37:21 AM	SiCl4 post valve closed
11/7/2011	11:37:21 AM	Bypass valve closed
11/7/2011	11:37:21 AM	Bubbler valve closed
11/7/2011	11:37:21 AM	Helium valve opened
11/7/2011	11:37:21 AM	Main Vac valve opened
11/7/2011	11:37:21 AM	Helium MFC set to  20.000000
11/7/2011	11:37:21 AM	H2 MFC set to  0.000000
11/7/2011	11:37:21 AM	BCl3 MFC set to  0.000000
11/7/2011	11:37:21 AM	PHl3 MFC set to  0.000000
11/7/2011	11:37:21 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:37:21 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:37:21 AM	Tube furnace set to 180
11/7/2011	11:37:51 AM	Helium valve closed
11/7/2011	11:37:51 AM	H2 valve closed
11/7/2011	11:37:51 AM	BCl3 valve closed
11/7/2011	11:37:51 AM	PH3 valve closed
11/7/2011	11:37:51 AM	SiCl4 pre valve closed
11/7/2011	11:37:51 AM	SiCl4 post valve closed
11/7/2011	11:37:51 AM	Bypass valve closed
11/7/2011	11:37:51 AM	Bubbler valve closed
11/7/2011	11:37:51 AM	Main Vac valve opened
11/7/2011	11:37:51 AM	Helium MFC set to  0.000000
11/7/2011	11:37:51 AM	H2 MFC set to  0.000000
11/7/2011	11:37:51 AM	BCl3 MFC set to  0.000000
11/7/2011	11:37:51 AM	PHl3 MFC set to  0.000000
11/7/2011	11:37:51 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:37:51 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:37:51 AM	Tube furnace set to 150
11/7/2011	11:38:21 AM	H2 valve closed
11/7/2011	11:38:21 AM	BCl3 valve closed
11/7/2011	11:38:21 AM	PH3 valve closed
11/7/2011	11:38:21 AM	SiCl4 pre valve closed
11/7/2011	11:38:21 AM	SiCl4 post valve closed
11/7/2011	11:38:21 AM	Bypass valve closed
11/7/2011	11:38:21 AM	Bubbler valve closed
11/7/2011	11:38:21 AM	Helium valve opened
11/7/2011	11:38:21 AM	Main Vac valve opened
11/7/2011	11:38:21 AM	Helium MFC set to  20.000000
11/7/2011	11:38:21 AM	H2 MFC set to  0.000000
11/7/2011	11:38:21 AM	BCl3 MFC set to  0.000000
11/7/2011	11:38:21 AM	PHl3 MFC set to  0.000000
11/7/2011	11:38:21 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:38:21 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:38:21 AM	Tube furnace set to 150
11/7/2011	11:38:51 AM	Helium valve closed
11/7/2011	11:38:51 AM	H2 valve closed
11/7/2011	11:38:51 AM	BCl3 valve closed
11/7/2011	11:38:51 AM	PH3 valve closed
11/7/2011	11:38:51 AM	SiCl4 pre valve closed
11/7/2011	11:38:51 AM	SiCl4 post valve closed
11/7/2011	11:38:51 AM	Bypass valve closed
11/7/2011	11:38:51 AM	Bubbler valve closed
11/7/2011	11:38:51 AM	Main Vac valve opened
11/7/2011	11:38:51 AM	Helium MFC set to  0.000000
11/7/2011	11:38:51 AM	H2 MFC set to  0.000000
11/7/2011	11:38:51 AM	BCl3 MFC set to  0.000000
11/7/2011	11:38:51 AM	PHl3 MFC set to  0.000000
11/7/2011	11:38:51 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:38:51 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:38:52 AM	Tube furnace set to 150
11/7/2011	11:39:22 AM	H2 valve closed
11/7/2011	11:39:22 AM	BCl3 valve closed
11/7/2011	11:39:22 AM	PH3 valve closed
11/7/2011	11:39:22 AM	SiCl4 pre valve closed
11/7/2011	11:39:22 AM	SiCl4 post valve closed
11/7/2011	11:39:22 AM	Bypass valve closed
11/7/2011	11:39:22 AM	Bubbler valve closed
11/7/2011	11:39:22 AM	Helium valve opened
11/7/2011	11:39:22 AM	Main Vac valve opened
11/7/2011	11:39:22 AM	Helium MFC set to  20.000000
11/7/2011	11:39:22 AM	H2 MFC set to  0.000000
11/7/2011	11:39:22 AM	BCl3 MFC set to  0.000000
11/7/2011	11:39:22 AM	PHl3 MFC set to  0.000000
11/7/2011	11:39:22 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:39:22 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:39:22 AM	Tube furnace set to 150
11/7/2011	11:39:52 AM	Helium valve closed
11/7/2011	11:39:52 AM	H2 valve closed
11/7/2011	11:39:52 AM	BCl3 valve closed
11/7/2011	11:39:52 AM	PH3 valve closed
11/7/2011	11:39:52 AM	SiCl4 pre valve closed
11/7/2011	11:39:52 AM	SiCl4 post valve closed
11/7/2011	11:39:52 AM	Bypass valve closed
11/7/2011	11:39:52 AM	Bubbler valve closed
11/7/2011	11:39:52 AM	Main Vac valve opened
11/7/2011	11:39:52 AM	Helium MFC set to  0.000000
11/7/2011	11:39:52 AM	H2 MFC set to  0.000000
11/7/2011	11:39:52 AM	BCl3 MFC set to  0.000000
11/7/2011	11:39:52 AM	PHl3 MFC set to  0.000000
11/7/2011	11:39:52 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:39:52 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:39:52 AM	Tube furnace set to 150
11/7/2011	11:40:22 AM	H2 valve closed
11/7/2011	11:40:22 AM	BCl3 valve closed
11/7/2011	11:40:22 AM	PH3 valve closed
11/7/2011	11:40:22 AM	SiCl4 pre valve closed
11/7/2011	11:40:22 AM	SiCl4 post valve closed
11/7/2011	11:40:22 AM	Bypass valve closed
11/7/2011	11:40:22 AM	Bubbler valve closed
11/7/2011	11:40:22 AM	Helium valve opened
11/7/2011	11:40:22 AM	Main Vac valve opened
11/7/2011	11:40:22 AM	Helium MFC set to  20.000000
11/7/2011	11:40:22 AM	H2 MFC set to  0.000000
11/7/2011	11:40:22 AM	BCl3 MFC set to  0.000000
11/7/2011	11:40:22 AM	PHl3 MFC set to  0.000000
11/7/2011	11:40:22 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:40:22 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:40:22 AM	Tube furnace set to 150
11/7/2011	11:40:52 AM	Helium valve closed
11/7/2011	11:40:52 AM	H2 valve closed
11/7/2011	11:40:52 AM	BCl3 valve closed
11/7/2011	11:40:52 AM	PH3 valve closed
11/7/2011	11:40:52 AM	SiCl4 pre valve closed
11/7/2011	11:40:52 AM	SiCl4 post valve closed
11/7/2011	11:40:52 AM	Bypass valve closed
11/7/2011	11:40:52 AM	Bubbler valve closed
11/7/2011	11:40:52 AM	Main Vac valve opened
11/7/2011	11:40:52 AM	Helium MFC set to  0.000000
11/7/2011	11:40:52 AM	H2 MFC set to  0.000000
11/7/2011	11:40:52 AM	BCl3 MFC set to  0.000000
11/7/2011	11:40:52 AM	PHl3 MFC set to  0.000000
11/7/2011	11:40:52 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:40:52 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:40:52 AM	Tube furnace set to 150
11/7/2011	11:41:22 AM	H2 valve closed
11/7/2011	11:41:22 AM	BCl3 valve closed
11/7/2011	11:41:22 AM	PH3 valve closed
11/7/2011	11:41:22 AM	SiCl4 pre valve closed
11/7/2011	11:41:22 AM	SiCl4 post valve closed
11/7/2011	11:41:22 AM	Bypass valve closed
11/7/2011	11:41:22 AM	Bubbler valve closed
11/7/2011	11:41:22 AM	Helium valve opened
11/7/2011	11:41:22 AM	Main Vac valve opened
11/7/2011	11:41:22 AM	Helium MFC set to  20.000000
11/7/2011	11:41:22 AM	H2 MFC set to  0.000000
11/7/2011	11:41:22 AM	BCl3 MFC set to  0.000000
11/7/2011	11:41:22 AM	PHl3 MFC set to  0.000000
11/7/2011	11:41:22 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:41:22 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:41:23 AM	Tube furnace set to 150
11/7/2011	11:41:53 AM	Helium valve closed
11/7/2011	11:41:53 AM	H2 valve closed
11/7/2011	11:41:53 AM	BCl3 valve closed
11/7/2011	11:41:53 AM	PH3 valve closed
11/7/2011	11:41:53 AM	SiCl4 pre valve closed
11/7/2011	11:41:53 AM	SiCl4 post valve closed
11/7/2011	11:41:53 AM	Bypass valve closed
11/7/2011	11:41:53 AM	Bubbler valve closed
11/7/2011	11:41:53 AM	Main Vac valve opened
11/7/2011	11:41:53 AM	Helium MFC set to  0.000000
11/7/2011	11:41:53 AM	H2 MFC set to  0.000000
11/7/2011	11:41:53 AM	BCl3 MFC set to  0.000000
11/7/2011	11:41:53 AM	PHl3 MFC set to  0.000000
11/7/2011	11:41:53 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:41:53 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:41:53 AM	Tube furnace set to 150
11/7/2011	11:42:23 AM	H2 valve closed
11/7/2011	11:42:23 AM	BCl3 valve closed
11/7/2011	11:42:23 AM	PH3 valve closed
11/7/2011	11:42:23 AM	SiCl4 pre valve closed
11/7/2011	11:42:23 AM	SiCl4 post valve closed
11/7/2011	11:42:23 AM	Bypass valve closed
11/7/2011	11:42:23 AM	Bubbler valve closed
11/7/2011	11:42:23 AM	Helium valve opened
11/7/2011	11:42:23 AM	Main Vac valve opened
11/7/2011	11:42:23 AM	Helium MFC set to  20.000000
11/7/2011	11:42:23 AM	H2 MFC set to  0.000000
11/7/2011	11:42:23 AM	BCl3 MFC set to  0.000000
11/7/2011	11:42:23 AM	PHl3 MFC set to  0.000000
11/7/2011	11:42:23 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:42:23 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:42:23 AM	Tube furnace set to 150
11/7/2011	11:42:53 AM	Helium valve closed
11/7/2011	11:42:53 AM	H2 valve closed
11/7/2011	11:42:53 AM	BCl3 valve closed
11/7/2011	11:42:53 AM	PH3 valve closed
11/7/2011	11:42:53 AM	SiCl4 pre valve closed
11/7/2011	11:42:53 AM	SiCl4 post valve closed
11/7/2011	11:42:53 AM	Bypass valve closed
11/7/2011	11:42:53 AM	Bubbler valve closed
11/7/2011	11:42:53 AM	Main Vac valve opened
11/7/2011	11:42:53 AM	Helium MFC set to  0.000000
11/7/2011	11:42:53 AM	H2 MFC set to  0.000000
11/7/2011	11:42:53 AM	BCl3 MFC set to  0.000000
11/7/2011	11:42:53 AM	PHl3 MFC set to  0.000000
11/7/2011	11:42:53 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:42:53 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:42:53 AM	Tube furnace set to 150
11/7/2011	11:43:23 AM	H2 valve closed
11/7/2011	11:43:23 AM	BCl3 valve closed
11/7/2011	11:43:23 AM	PH3 valve closed
11/7/2011	11:43:23 AM	SiCl4 pre valve closed
11/7/2011	11:43:23 AM	SiCl4 post valve closed
11/7/2011	11:43:23 AM	Bypass valve closed
11/7/2011	11:43:23 AM	Bubbler valve closed
11/7/2011	11:43:23 AM	Helium valve opened
11/7/2011	11:43:23 AM	Main Vac valve opened
11/7/2011	11:43:23 AM	Helium MFC set to  20.000000
11/7/2011	11:43:23 AM	H2 MFC set to  0.000000
11/7/2011	11:43:23 AM	BCl3 MFC set to  0.000000
11/7/2011	11:43:23 AM	PHl3 MFC set to  0.000000
11/7/2011	11:43:23 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:43:23 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:43:23 AM	Tube furnace set to 150
11/7/2011	11:43:54 AM	Helium valve closed
11/7/2011	11:43:54 AM	H2 valve closed
11/7/2011	11:43:54 AM	BCl3 valve closed
11/7/2011	11:43:54 AM	PH3 valve closed
11/7/2011	11:43:54 AM	SiCl4 pre valve closed
11/7/2011	11:43:54 AM	SiCl4 post valve closed
11/7/2011	11:43:54 AM	Bypass valve closed
11/7/2011	11:43:54 AM	Bubbler valve closed
11/7/2011	11:43:54 AM	Main Vac valve opened
11/7/2011	11:43:54 AM	Helium MFC set to  0.000000
11/7/2011	11:43:54 AM	H2 MFC set to  0.000000
11/7/2011	11:43:54 AM	BCl3 MFC set to  0.000000
11/7/2011	11:43:54 AM	PHl3 MFC set to  0.000000
11/7/2011	11:43:54 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:43:54 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:43:54 AM	Tube furnace set to 150
11/7/2011	11:44:24 AM	H2 valve closed
11/7/2011	11:44:24 AM	BCl3 valve closed
11/7/2011	11:44:24 AM	PH3 valve closed
11/7/2011	11:44:24 AM	SiCl4 pre valve closed
11/7/2011	11:44:24 AM	SiCl4 post valve closed
11/7/2011	11:44:24 AM	Bypass valve closed
11/7/2011	11:44:24 AM	Bubbler valve closed
11/7/2011	11:44:24 AM	Helium valve opened
11/7/2011	11:44:24 AM	Main Vac valve opened
11/7/2011	11:44:24 AM	Helium MFC set to  20.000000
11/7/2011	11:44:24 AM	H2 MFC set to  0.000000
11/7/2011	11:44:24 AM	BCl3 MFC set to  0.000000
11/7/2011	11:44:24 AM	PHl3 MFC set to  0.000000
11/7/2011	11:44:24 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:44:24 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:44:24 AM	Tube furnace set to 150
11/7/2011	11:44:54 AM	Helium valve closed
11/7/2011	11:44:54 AM	H2 valve closed
11/7/2011	11:44:54 AM	BCl3 valve closed
11/7/2011	11:44:54 AM	PH3 valve closed
11/7/2011	11:44:54 AM	SiCl4 pre valve closed
11/7/2011	11:44:54 AM	SiCl4 post valve closed
11/7/2011	11:44:54 AM	Bypass valve closed
11/7/2011	11:44:54 AM	Bubbler valve closed
11/7/2011	11:44:54 AM	Main Vac valve opened
11/7/2011	11:44:54 AM	Helium MFC set to  0.000000
11/7/2011	11:44:54 AM	H2 MFC set to  0.000000
11/7/2011	11:44:54 AM	BCl3 MFC set to  0.000000
11/7/2011	11:44:54 AM	PHl3 MFC set to  0.000000
11/7/2011	11:44:54 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:44:54 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:44:54 AM	Tube furnace set to 150
11/7/2011	11:45:24 AM	H2 valve closed
11/7/2011	11:45:24 AM	BCl3 valve closed
11/7/2011	11:45:24 AM	PH3 valve closed
11/7/2011	11:45:24 AM	SiCl4 pre valve closed
11/7/2011	11:45:24 AM	SiCl4 post valve closed
11/7/2011	11:45:24 AM	Bypass valve closed
11/7/2011	11:45:24 AM	Bubbler valve closed
11/7/2011	11:45:24 AM	Helium valve opened
11/7/2011	11:45:24 AM	Main Vac valve opened
11/7/2011	11:45:24 AM	Helium MFC set to  20.000000
11/7/2011	11:45:24 AM	H2 MFC set to  0.000000
11/7/2011	11:45:24 AM	BCl3 MFC set to  0.000000
11/7/2011	11:45:24 AM	PHl3 MFC set to  0.000000
11/7/2011	11:45:24 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:45:24 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:45:25 AM	Tube furnace set to 150
11/7/2011	11:45:54 AM	Helium valve closed
11/7/2011	11:45:54 AM	H2 valve closed
11/7/2011	11:45:54 AM	BCl3 valve closed
11/7/2011	11:45:54 AM	PH3 valve closed
11/7/2011	11:45:54 AM	SiCl4 pre valve closed
11/7/2011	11:45:54 AM	SiCl4 post valve closed
11/7/2011	11:45:54 AM	Bypass valve closed
11/7/2011	11:45:54 AM	Bubbler valve closed
11/7/2011	11:45:54 AM	Main Vac valve opened
11/7/2011	11:45:54 AM	Helium MFC set to  0.000000
11/7/2011	11:45:54 AM	H2 MFC set to  0.000000
11/7/2011	11:45:54 AM	BCl3 MFC set to  0.000000
11/7/2011	11:45:54 AM	PHl3 MFC set to  0.000000
11/7/2011	11:45:54 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:45:54 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:45:55 AM	Tube furnace set to 150
11/7/2011	11:46:25 AM	H2 valve closed
11/7/2011	11:46:25 AM	BCl3 valve closed
11/7/2011	11:46:25 AM	PH3 valve closed
11/7/2011	11:46:25 AM	SiCl4 pre valve closed
11/7/2011	11:46:25 AM	SiCl4 post valve closed
11/7/2011	11:46:25 AM	Bypass valve closed
11/7/2011	11:46:25 AM	Bubbler valve closed
11/7/2011	11:46:25 AM	Helium valve opened
11/7/2011	11:46:25 AM	Main Vac valve opened
11/7/2011	11:46:25 AM	Helium MFC set to  20.000000
11/7/2011	11:46:25 AM	H2 MFC set to  0.000000
11/7/2011	11:46:25 AM	BCl3 MFC set to  0.000000
11/7/2011	11:46:25 AM	PHl3 MFC set to  0.000000
11/7/2011	11:46:25 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:46:25 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:46:25 AM	Tube furnace set to 150
11/7/2011	11:46:55 AM	Helium valve closed
11/7/2011	11:46:55 AM	H2 valve closed
11/7/2011	11:46:55 AM	BCl3 valve closed
11/7/2011	11:46:55 AM	PH3 valve closed
11/7/2011	11:46:55 AM	SiCl4 pre valve closed
11/7/2011	11:46:55 AM	SiCl4 post valve closed
11/7/2011	11:46:55 AM	Bypass valve closed
11/7/2011	11:46:55 AM	Bubbler valve closed
11/7/2011	11:46:55 AM	Main Vac valve opened
11/7/2011	11:46:55 AM	Helium MFC set to  0.000000
11/7/2011	11:46:55 AM	H2 MFC set to  0.000000
11/7/2011	11:46:55 AM	BCl3 MFC set to  0.000000
11/7/2011	11:46:55 AM	PHl3 MFC set to  0.000000
11/7/2011	11:46:55 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:46:55 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:46:55 AM	Tube furnace set to 150
11/7/2011	11:47:25 AM	H2 valve closed
11/7/2011	11:47:25 AM	BCl3 valve closed
11/7/2011	11:47:25 AM	PH3 valve closed
11/7/2011	11:47:25 AM	SiCl4 pre valve closed
11/7/2011	11:47:25 AM	SiCl4 post valve closed
11/7/2011	11:47:25 AM	Bypass valve closed
11/7/2011	11:47:25 AM	Bubbler valve closed
11/7/2011	11:47:25 AM	Helium valve opened
11/7/2011	11:47:25 AM	Main Vac valve opened
11/7/2011	11:47:25 AM	Helium MFC set to  20.000000
11/7/2011	11:47:25 AM	H2 MFC set to  0.000000
11/7/2011	11:47:25 AM	BCl3 MFC set to  0.000000
11/7/2011	11:47:25 AM	PHl3 MFC set to  0.000000
11/7/2011	11:47:25 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:47:25 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:47:25 AM	Tube furnace set to 150
11/7/2011	11:47:55 AM	Helium valve closed
11/7/2011	11:47:55 AM	H2 valve closed
11/7/2011	11:47:55 AM	BCl3 valve closed
11/7/2011	11:47:55 AM	PH3 valve closed
11/7/2011	11:47:55 AM	SiCl4 pre valve closed
11/7/2011	11:47:55 AM	SiCl4 post valve closed
11/7/2011	11:47:55 AM	Bypass valve closed
11/7/2011	11:47:55 AM	Bubbler valve closed
11/7/2011	11:47:55 AM	Main Vac valve opened
11/7/2011	11:47:55 AM	Helium MFC set to  0.000000
11/7/2011	11:47:55 AM	H2 MFC set to  0.000000
11/7/2011	11:47:55 AM	BCl3 MFC set to  0.000000
11/7/2011	11:47:55 AM	PHl3 MFC set to  0.000000
11/7/2011	11:47:55 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:47:55 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:47:56 AM	Tube furnace set to 150
11/7/2011	11:48:26 AM	H2 valve closed
11/7/2011	11:48:26 AM	BCl3 valve closed
11/7/2011	11:48:26 AM	PH3 valve closed
11/7/2011	11:48:26 AM	SiCl4 pre valve closed
11/7/2011	11:48:26 AM	SiCl4 post valve closed
11/7/2011	11:48:26 AM	Bypass valve closed
11/7/2011	11:48:26 AM	Bubbler valve closed
11/7/2011	11:48:26 AM	Helium valve opened
11/7/2011	11:48:26 AM	Main Vac valve opened
11/7/2011	11:48:26 AM	Helium MFC set to  20.000000
11/7/2011	11:48:26 AM	H2 MFC set to  0.000000
11/7/2011	11:48:26 AM	BCl3 MFC set to  0.000000
11/7/2011	11:48:26 AM	PHl3 MFC set to  0.000000
11/7/2011	11:48:26 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:48:26 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:48:26 AM	Tube furnace set to 150
11/7/2011	11:48:56 AM	Helium valve closed
11/7/2011	11:48:56 AM	H2 valve closed
11/7/2011	11:48:56 AM	BCl3 valve closed
11/7/2011	11:48:56 AM	PH3 valve closed
11/7/2011	11:48:56 AM	SiCl4 pre valve closed
11/7/2011	11:48:56 AM	SiCl4 post valve closed
11/7/2011	11:48:56 AM	Bypass valve closed
11/7/2011	11:48:56 AM	Bubbler valve closed
11/7/2011	11:48:56 AM	Main Vac valve opened
11/7/2011	11:48:56 AM	Helium MFC set to  0.000000
11/7/2011	11:48:56 AM	H2 MFC set to  0.000000
11/7/2011	11:48:56 AM	BCl3 MFC set to  0.000000
11/7/2011	11:48:56 AM	PHl3 MFC set to  0.000000
11/7/2011	11:48:56 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:48:56 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:48:56 AM	Tube furnace set to 150
11/7/2011	11:49:26 AM	H2 valve closed
11/7/2011	11:49:26 AM	BCl3 valve closed
11/7/2011	11:49:26 AM	PH3 valve closed
11/7/2011	11:49:26 AM	SiCl4 pre valve closed
11/7/2011	11:49:26 AM	SiCl4 post valve closed
11/7/2011	11:49:26 AM	Bypass valve closed
11/7/2011	11:49:26 AM	Bubbler valve closed
11/7/2011	11:49:26 AM	Helium valve opened
11/7/2011	11:49:26 AM	Main Vac valve opened
11/7/2011	11:49:26 AM	Helium MFC set to  20.000000
11/7/2011	11:49:26 AM	H2 MFC set to  0.000000
11/7/2011	11:49:26 AM	BCl3 MFC set to  0.000000
11/7/2011	11:49:26 AM	PHl3 MFC set to  0.000000
11/7/2011	11:49:26 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:49:26 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:49:26 AM	Tube furnace set to 150
11/7/2011	11:49:56 AM	Helium valve closed
11/7/2011	11:49:56 AM	H2 valve closed
11/7/2011	11:49:56 AM	BCl3 valve closed
11/7/2011	11:49:56 AM	PH3 valve closed
11/7/2011	11:49:56 AM	SiCl4 pre valve closed
11/7/2011	11:49:56 AM	SiCl4 post valve closed
11/7/2011	11:49:56 AM	Bypass valve closed
11/7/2011	11:49:56 AM	Bubbler valve closed
11/7/2011	11:49:56 AM	Main Vac valve opened
11/7/2011	11:49:56 AM	Helium MFC set to  0.000000
11/7/2011	11:49:56 AM	H2 MFC set to  0.000000
11/7/2011	11:49:56 AM	BCl3 MFC set to  0.000000
11/7/2011	11:49:56 AM	PHl3 MFC set to  0.000000
11/7/2011	11:49:56 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:49:56 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:49:56 AM	Tube furnace set to 150
11/7/2011	11:50:26 AM	H2 valve closed
11/7/2011	11:50:26 AM	BCl3 valve closed
11/7/2011	11:50:26 AM	PH3 valve closed
11/7/2011	11:50:26 AM	SiCl4 pre valve closed
11/7/2011	11:50:26 AM	SiCl4 post valve closed
11/7/2011	11:50:26 AM	Bypass valve closed
11/7/2011	11:50:26 AM	Bubbler valve closed
11/7/2011	11:50:26 AM	Helium valve opened
11/7/2011	11:50:26 AM	Main Vac valve opened
11/7/2011	11:50:26 AM	Helium MFC set to  20.000000
11/7/2011	11:50:26 AM	H2 MFC set to  0.000000
11/7/2011	11:50:26 AM	BCl3 MFC set to  0.000000
11/7/2011	11:50:26 AM	PHl3 MFC set to  0.000000
11/7/2011	11:50:26 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:50:26 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:50:27 AM	Tube furnace set to 150
11/7/2011	11:50:57 AM	Helium valve closed
11/7/2011	11:50:57 AM	H2 valve closed
11/7/2011	11:50:57 AM	BCl3 valve closed
11/7/2011	11:50:57 AM	PH3 valve closed
11/7/2011	11:50:57 AM	SiCl4 pre valve closed
11/7/2011	11:50:57 AM	SiCl4 post valve closed
11/7/2011	11:50:57 AM	Bypass valve closed
11/7/2011	11:50:57 AM	Bubbler valve closed
11/7/2011	11:50:57 AM	Main Vac valve opened
11/7/2011	11:50:57 AM	Helium MFC set to  0.000000
11/7/2011	11:50:57 AM	H2 MFC set to  0.000000
11/7/2011	11:50:57 AM	BCl3 MFC set to  0.000000
11/7/2011	11:50:57 AM	PHl3 MFC set to  0.000000
11/7/2011	11:50:57 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:50:57 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:50:57 AM	Tube furnace set to 150
11/7/2011	11:51:27 AM	H2 valve closed
11/7/2011	11:51:27 AM	BCl3 valve closed
11/7/2011	11:51:27 AM	PH3 valve closed
11/7/2011	11:51:27 AM	SiCl4 pre valve closed
11/7/2011	11:51:27 AM	SiCl4 post valve closed
11/7/2011	11:51:27 AM	Bypass valve closed
11/7/2011	11:51:27 AM	Bubbler valve closed
11/7/2011	11:51:27 AM	Helium valve opened
11/7/2011	11:51:27 AM	Main Vac valve opened
11/7/2011	11:51:27 AM	Helium MFC set to  20.000000
11/7/2011	11:51:27 AM	H2 MFC set to  0.000000
11/7/2011	11:51:27 AM	BCl3 MFC set to  0.000000
11/7/2011	11:51:27 AM	PHl3 MFC set to  0.000000
11/7/2011	11:51:27 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:51:27 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:51:27 AM	Tube furnace set to 150
11/7/2011	11:51:57 AM	Helium valve closed
11/7/2011	11:51:57 AM	H2 valve closed
11/7/2011	11:51:57 AM	BCl3 valve closed
11/7/2011	11:51:57 AM	PH3 valve closed
11/7/2011	11:51:57 AM	SiCl4 pre valve closed
11/7/2011	11:51:57 AM	SiCl4 post valve closed
11/7/2011	11:51:57 AM	Bypass valve closed
11/7/2011	11:51:57 AM	Bubbler valve closed
11/7/2011	11:51:57 AM	Main Vac valve opened
11/7/2011	11:51:57 AM	Helium MFC set to  0.000000
11/7/2011	11:51:57 AM	H2 MFC set to  0.000000
11/7/2011	11:51:57 AM	BCl3 MFC set to  0.000000
11/7/2011	11:51:57 AM	PHl3 MFC set to  0.000000
11/7/2011	11:51:57 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:51:57 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:51:57 AM	Tube furnace set to 150
11/7/2011	11:52:27 AM	H2 valve closed
11/7/2011	11:52:27 AM	BCl3 valve closed
11/7/2011	11:52:27 AM	PH3 valve closed
11/7/2011	11:52:27 AM	SiCl4 pre valve closed
11/7/2011	11:52:27 AM	SiCl4 post valve closed
11/7/2011	11:52:27 AM	Bypass valve closed
11/7/2011	11:52:27 AM	Bubbler valve closed
11/7/2011	11:52:27 AM	Helium valve opened
11/7/2011	11:52:27 AM	Main Vac valve opened
11/7/2011	11:52:27 AM	Helium MFC set to  20.000000
11/7/2011	11:52:27 AM	H2 MFC set to  0.000000
11/7/2011	11:52:27 AM	BCl3 MFC set to  0.000000
11/7/2011	11:52:27 AM	PHl3 MFC set to  0.000000
11/7/2011	11:52:27 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:52:27 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:52:27 AM	Tube furnace set to 150
11/7/2011	11:52:57 AM	Helium valve closed
11/7/2011	11:52:57 AM	H2 valve closed
11/7/2011	11:52:57 AM	BCl3 valve closed
11/7/2011	11:52:57 AM	PH3 valve closed
11/7/2011	11:52:57 AM	SiCl4 pre valve closed
11/7/2011	11:52:57 AM	SiCl4 post valve closed
11/7/2011	11:52:57 AM	Bypass valve closed
11/7/2011	11:52:57 AM	Bubbler valve closed
11/7/2011	11:52:57 AM	Main Vac valve opened
11/7/2011	11:52:57 AM	Helium MFC set to  0.000000
11/7/2011	11:52:57 AM	H2 MFC set to  0.000000
11/7/2011	11:52:57 AM	BCl3 MFC set to  0.000000
11/7/2011	11:52:57 AM	PHl3 MFC set to  0.000000
11/7/2011	11:52:57 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:52:57 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:52:58 AM	Tube furnace set to 150
11/7/2011	11:53:28 AM	H2 valve closed
11/7/2011	11:53:28 AM	BCl3 valve closed
11/7/2011	11:53:28 AM	PH3 valve closed
11/7/2011	11:53:28 AM	SiCl4 pre valve closed
11/7/2011	11:53:28 AM	SiCl4 post valve closed
11/7/2011	11:53:28 AM	Bypass valve closed
11/7/2011	11:53:28 AM	Bubbler valve closed
11/7/2011	11:53:28 AM	Helium valve opened
11/7/2011	11:53:28 AM	Main Vac valve opened
11/7/2011	11:53:28 AM	Helium MFC set to  20.000000
11/7/2011	11:53:28 AM	H2 MFC set to  0.000000
11/7/2011	11:53:28 AM	BCl3 MFC set to  0.000000
11/7/2011	11:53:28 AM	PHl3 MFC set to  0.000000
11/7/2011	11:53:28 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:53:28 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:53:28 AM	Tube furnace set to 150
11/7/2011	11:53:58 AM	Helium valve closed
11/7/2011	11:53:58 AM	H2 valve closed
11/7/2011	11:53:58 AM	BCl3 valve closed
11/7/2011	11:53:58 AM	PH3 valve closed
11/7/2011	11:53:58 AM	SiCl4 pre valve closed
11/7/2011	11:53:58 AM	SiCl4 post valve closed
11/7/2011	11:53:58 AM	Bypass valve closed
11/7/2011	11:53:58 AM	Bubbler valve closed
11/7/2011	11:53:58 AM	Main Vac valve opened
11/7/2011	11:53:58 AM	Helium MFC set to  0.000000
11/7/2011	11:53:58 AM	H2 MFC set to  0.000000
11/7/2011	11:53:58 AM	BCl3 MFC set to  0.000000
11/7/2011	11:53:58 AM	PHl3 MFC set to  0.000000
11/7/2011	11:53:58 AM	SiCl4 MFC set to  0.000000
11/7/2011	11:53:58 AM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:53:58 AM	Tube furnace set to 180
11/7/2011	11:54:03 AM	Run finished at 11:54 AM
11/7/2011	12:12:21 PM	Main Vac valve closed
11/7/2011	12:12:34 PM	Main Vac valve opened
11/7/2011	12:13:09 PM	Recipe started at 12:13 PM
11/7/2011	12:13:09 PM	H2 valve closed
11/7/2011	12:13:09 PM	BCl3 valve closed
11/7/2011	12:13:09 PM	PH3 valve closed
11/7/2011	12:13:09 PM	SiCl4 pre valve closed
11/7/2011	12:13:09 PM	SiCl4 post valve closed
11/7/2011	12:13:09 PM	Main Vac valve closed
11/7/2011	12:13:09 PM	Bypass valve closed
11/7/2011	12:13:09 PM	Bubbler valve closed
11/7/2011	12:13:09 PM	Helium valve opened
11/7/2011	12:13:09 PM	Helium MFC set to  0.000000
11/7/2011	12:13:09 PM	H2 MFC set to  0.000000
11/7/2011	12:13:09 PM	BCl3 MFC set to  0.000000
11/7/2011	12:13:09 PM	PHl3 MFC set to  0.000000
11/7/2011	12:13:09 PM	SiCl4 MFC set to  0.000000
11/7/2011	12:13:09 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	12:13:09 PM	Tube furnace set to 0
11/7/2011	12:13:12 PM	Helium valve closed
11/7/2011	12:13:12 PM	BCl3 valve closed
11/7/2011	12:13:12 PM	PH3 valve closed
11/7/2011	12:13:12 PM	SiCl4 pre valve closed
11/7/2011	12:13:12 PM	SiCl4 post valve closed
11/7/2011	12:13:12 PM	Main Vac valve closed
11/7/2011	12:13:12 PM	Bypass valve closed
11/7/2011	12:13:12 PM	Bubbler valve closed
11/7/2011	12:13:12 PM	H2 valve opened
11/7/2011	12:13:12 PM	Helium MFC set to  0.000000
11/7/2011	12:13:12 PM	H2 MFC set to  500.000000
11/7/2011	12:13:12 PM	BCl3 MFC set to  0.000000
11/7/2011	12:13:12 PM	PHl3 MFC set to  0.000000
11/7/2011	12:13:12 PM	SiCl4 MFC set to  0.000000
11/7/2011	12:13:12 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	12:13:12 PM	Tube furnace set to 100
11/7/2011	12:14:20 PM	Helium valve closed
11/7/2011	12:14:20 PM	BCl3 valve closed
11/7/2011	12:14:20 PM	PH3 valve closed
11/7/2011	12:14:20 PM	SiCl4 pre valve closed
11/7/2011	12:14:20 PM	SiCl4 post valve closed
11/7/2011	12:14:20 PM	Main Vac valve closed
11/7/2011	12:14:20 PM	Bypass valve closed
11/7/2011	12:14:20 PM	H2 valve opened
11/7/2011	12:14:20 PM	Bubbler valve opened
11/7/2011	12:14:20 PM	Helium MFC set to  0.000000
11/7/2011	12:14:20 PM	H2 MFC set to  500.000000
11/7/2011	12:14:20 PM	BCl3 MFC set to  0.000000
11/7/2011	12:14:20 PM	PHl3 MFC set to  0.000000
11/7/2011	12:14:20 PM	SiCl4 MFC set to  0.000000
11/7/2011	12:14:20 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	12:14:20 PM	Tube furnace set to 1000
11/7/2011	12:14:21 PM	Helium valve closed
11/7/2011	12:14:21 PM	BCl3 valve closed
11/7/2011	12:14:21 PM	PH3 valve closed
11/7/2011	12:14:21 PM	SiCl4 pre valve closed
11/7/2011	12:14:21 PM	SiCl4 post valve closed
11/7/2011	12:14:21 PM	Main Vac valve closed
11/7/2011	12:14:21 PM	Bypass valve closed
11/7/2011	12:14:21 PM	H2 valve opened
11/7/2011	12:14:21 PM	Bubbler valve opened
11/7/2011	12:14:21 PM	Helium MFC set to  0.000000
11/7/2011	12:14:21 PM	H2 MFC set to  500.000000
11/7/2011	12:14:21 PM	BCl3 MFC set to  0.000000
11/7/2011	12:14:21 PM	PHl3 MFC set to  0.000000
11/7/2011	12:14:21 PM	SiCl4 MFC set to  0.000000
11/7/2011	12:14:21 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	12:14:22 PM	Tube furnace set to 1000
11/7/2011	12:17:54 PM	Run aborted at 12:17 PM
11/7/2011	12:17:54 PM	Helium valve closed
11/7/2011	12:17:54 PM	H2 valve closed
11/7/2011	12:17:54 PM	BCl3 valve closed
11/7/2011	12:17:54 PM	PH3 valve closed
11/7/2011	12:17:54 PM	SiCl4 pre valve closed
11/7/2011	12:17:54 PM	SiCl4 post valve closed
11/7/2011	12:17:54 PM	Bypass valve closed
11/7/2011	12:17:54 PM	Main Vac valve closed
11/7/2011	12:17:54 PM	Bubbler valve closed
11/7/2011	12:17:54 PM	Helium MFC set to  0.000000
11/7/2011	12:17:54 PM	H2 MFC set to  0.000000
11/7/2011	12:17:54 PM	BCl3 MFC set to  0.000000
11/7/2011	12:17:54 PM	PHl3 MFC set to  0.000000
11/7/2011	12:17:54 PM	SiCl4 MFC set to  0.000000
11/7/2011	12:17:54 PM	Tube furnace set to 0
11/7/2011	12:18:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/7/2011	12:18:32 PM	Recipe started at 12:18 PM
11/7/2011	12:18:32 PM	Helium valve closed
11/7/2011	12:18:32 PM	H2 valve closed
11/7/2011	12:18:32 PM	BCl3 valve closed
11/7/2011	12:18:32 PM	PH3 valve closed
11/7/2011	12:18:32 PM	SiCl4 pre valve closed
11/7/2011	12:18:32 PM	SiCl4 post valve closed
11/7/2011	12:18:32 PM	Main Vac valve closed
11/7/2011	12:18:32 PM	Bubbler valve closed
11/7/2011	12:18:32 PM	Bypass valve opened
11/7/2011	12:18:32 PM	Helium MFC set to  0.000000
11/7/2011	12:18:32 PM	H2 MFC set to  0.000000
11/7/2011	12:18:32 PM	BCl3 MFC set to  0.000000
11/7/2011	12:18:32 PM	PHl3 MFC set to  0.000000
11/7/2011	12:18:32 PM	SiCl4 MFC set to  0.000000
11/7/2011	12:18:32 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	12:18:33 PM	Tube furnace set to 0
11/7/2011	12:19:10 PM	Helium valve closed
11/7/2011	12:19:10 PM	H2 valve closed
11/7/2011	12:19:10 PM	BCl3 valve closed
11/7/2011	12:19:10 PM	PH3 valve closed
11/7/2011	12:19:10 PM	SiCl4 pre valve closed
11/7/2011	12:19:10 PM	SiCl4 post valve closed
11/7/2011	12:19:10 PM	Main Vac valve closed
11/7/2011	12:19:10 PM	Bubbler valve closed
11/7/2011	12:19:10 PM	Bypass valve opened
11/7/2011	12:19:10 PM	Helium MFC set to  0.000000
11/7/2011	12:19:10 PM	H2 MFC set to  0.000000
11/7/2011	12:19:10 PM	BCl3 MFC set to  0.000000
11/7/2011	12:19:10 PM	PHl3 MFC set to  0.000000
11/7/2011	12:19:10 PM	SiCl4 MFC set to  0.000000
11/7/2011	12:19:10 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	12:19:10 PM	Tube furnace set to 0
11/7/2011	12:19:56 PM	Helium valve closed
11/7/2011	12:19:56 PM	H2 valve closed
11/7/2011	12:19:56 PM	BCl3 valve closed
11/7/2011	12:19:56 PM	PH3 valve closed
11/7/2011	12:19:56 PM	SiCl4 pre valve closed
11/7/2011	12:19:56 PM	SiCl4 post valve closed
11/7/2011	12:19:56 PM	Bypass valve closed
11/7/2011	12:19:56 PM	Bubbler valve closed
11/7/2011	12:19:56 PM	Main Vac valve opened
11/7/2011	12:19:56 PM	Helium MFC set to  0.000000
11/7/2011	12:19:56 PM	H2 MFC set to  0.000000
11/7/2011	12:19:56 PM	BCl3 MFC set to  0.000000
11/7/2011	12:19:56 PM	PHl3 MFC set to  0.000000
11/7/2011	12:19:56 PM	SiCl4 MFC set to  0.000000
11/7/2011	12:19:56 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	12:19:56 PM	Tube furnace set to 0
11/7/2011	12:19:57 PM	Run finished at 12:19 PM
11/7/2011	12:19:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/7/2011	12:20:10 PM	Recipe started at 12:20 PM
11/7/2011	12:20:10 PM	H2 valve closed
11/7/2011	12:20:10 PM	BCl3 valve closed
11/7/2011	12:20:10 PM	PH3 valve closed
11/7/2011	12:20:10 PM	SiCl4 pre valve closed
11/7/2011	12:20:10 PM	SiCl4 post valve closed
11/7/2011	12:20:10 PM	Main Vac valve closed
11/7/2011	12:20:10 PM	Bypass valve closed
11/7/2011	12:20:10 PM	Bubbler valve closed
11/7/2011	12:20:10 PM	Helium valve opened
11/7/2011	12:20:10 PM	Helium MFC set to  0.000000
11/7/2011	12:20:10 PM	H2 MFC set to  0.000000
11/7/2011	12:20:10 PM	BCl3 MFC set to  0.000000
11/7/2011	12:20:10 PM	PHl3 MFC set to  0.000000
11/7/2011	12:20:10 PM	SiCl4 MFC set to  0.000000
11/7/2011	12:20:10 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	12:20:10 PM	Tube furnace set to 0
11/7/2011	12:20:13 PM	Helium valve closed
11/7/2011	12:20:13 PM	BCl3 valve closed
11/7/2011	12:20:13 PM	PH3 valve closed
11/7/2011	12:20:13 PM	SiCl4 pre valve closed
11/7/2011	12:20:13 PM	SiCl4 post valve closed
11/7/2011	12:20:13 PM	Main Vac valve closed
11/7/2011	12:20:13 PM	Bypass valve closed
11/7/2011	12:20:13 PM	Bubbler valve closed
11/7/2011	12:20:13 PM	H2 valve opened
11/7/2011	12:20:13 PM	Helium MFC set to  0.000000
11/7/2011	12:20:13 PM	H2 MFC set to  500.000000
11/7/2011	12:20:13 PM	BCl3 MFC set to  0.000000
11/7/2011	12:20:13 PM	PHl3 MFC set to  0.000000
11/7/2011	12:20:13 PM	SiCl4 MFC set to  0.000000
11/7/2011	12:20:13 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	12:20:13 PM	Tube furnace set to 100
11/7/2011	12:21:21 PM	Helium valve closed
11/7/2011	12:21:22 PM	BCl3 valve closed
11/7/2011	12:21:22 PM	PH3 valve closed
11/7/2011	12:21:22 PM	SiCl4 pre valve closed
11/7/2011	12:21:22 PM	SiCl4 post valve closed
11/7/2011	12:21:22 PM	Main Vac valve closed
11/7/2011	12:21:22 PM	Bypass valve closed
11/7/2011	12:21:22 PM	H2 valve opened
11/7/2011	12:21:22 PM	Bubbler valve opened
11/7/2011	12:21:22 PM	Helium MFC set to  0.000000
11/7/2011	12:21:22 PM	H2 MFC set to  500.000000
11/7/2011	12:21:22 PM	BCl3 MFC set to  0.000000
11/7/2011	12:21:22 PM	PHl3 MFC set to  0.000000
11/7/2011	12:21:22 PM	SiCl4 MFC set to  0.000000
11/7/2011	12:21:22 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	12:21:22 PM	Tube furnace set to 1000
11/7/2011	12:21:23 PM	Helium valve closed
11/7/2011	12:21:23 PM	BCl3 valve closed
11/7/2011	12:21:23 PM	PH3 valve closed
11/7/2011	12:21:23 PM	SiCl4 pre valve closed
11/7/2011	12:21:23 PM	SiCl4 post valve closed
11/7/2011	12:21:23 PM	Main Vac valve closed
11/7/2011	12:21:23 PM	Bypass valve closed
11/7/2011	12:21:23 PM	H2 valve opened
11/7/2011	12:21:23 PM	Bubbler valve opened
11/7/2011	12:21:23 PM	Helium MFC set to  0.000000
11/7/2011	12:21:23 PM	H2 MFC set to  500.000000
11/7/2011	12:21:23 PM	BCl3 MFC set to  0.000000
11/7/2011	12:21:23 PM	PHl3 MFC set to  0.000000
11/7/2011	12:21:23 PM	SiCl4 MFC set to  0.000000
11/7/2011	12:21:23 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	12:21:23 PM	Tube furnace set to 1000
11/7/2011	12:45:23 PM	Helium valve closed
11/7/2011	12:45:23 PM	BCl3 valve closed
11/7/2011	12:45:23 PM	PH3 valve closed
11/7/2011	12:45:23 PM	Main Vac valve closed
11/7/2011	12:45:23 PM	Bypass valve closed
11/7/2011	12:45:23 PM	H2 valve opened
11/7/2011	12:45:23 PM	SiCl4 pre valve opened
11/7/2011	12:45:23 PM	SiCl4 post valve opened
11/7/2011	12:45:23 PM	Bubbler valve opened
11/7/2011	12:45:23 PM	Helium MFC set to  0.000000
11/7/2011	12:45:23 PM	H2 MFC set to  500.000000
11/7/2011	12:45:23 PM	BCl3 MFC set to  0.000000
11/7/2011	12:45:23 PM	PHl3 MFC set to  0.000000
11/7/2011	12:45:23 PM	SiCl4 MFC set to  18.000000
11/7/2011	12:45:23 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	12:45:23 PM	Tube furnace set to 1000
11/7/2011	1:03:23 PM	Helium valve closed
11/7/2011	1:03:23 PM	BCl3 valve closed
11/7/2011	1:03:23 PM	PH3 valve closed
11/7/2011	1:03:23 PM	SiCl4 pre valve closed
11/7/2011	1:03:23 PM	SiCl4 post valve closed
11/7/2011	1:03:23 PM	Main Vac valve closed
11/7/2011	1:03:23 PM	Bypass valve closed
11/7/2011	1:03:23 PM	H2 valve opened
11/7/2011	1:03:23 PM	Bubbler valve opened
11/7/2011	1:03:23 PM	Helium MFC set to  0.000000
11/7/2011	1:03:23 PM	H2 MFC set to  500.000000
11/7/2011	1:03:23 PM	BCl3 MFC set to  0.000000
11/7/2011	1:03:23 PM	PHl3 MFC set to  0.000000
11/7/2011	1:03:23 PM	SiCl4 MFC set to  0.000000
11/7/2011	1:03:23 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	1:03:23 PM	Tube furnace set to 750
11/7/2011	1:13:23 PM	H2 valve closed
11/7/2011	1:13:23 PM	BCl3 valve closed
11/7/2011	1:13:23 PM	PH3 valve closed
11/7/2011	1:13:23 PM	SiCl4 pre valve closed
11/7/2011	1:13:23 PM	SiCl4 post valve closed
11/7/2011	1:13:23 PM	Main Vac valve closed
11/7/2011	1:13:23 PM	Bypass valve closed
11/7/2011	1:13:23 PM	Helium valve opened
11/7/2011	1:13:23 PM	Bubbler valve opened
11/7/2011	1:13:23 PM	Helium MFC set to  400.000000
11/7/2011	1:13:23 PM	H2 MFC set to  0.000000
11/7/2011	1:13:23 PM	BCl3 MFC set to  0.000000
11/7/2011	1:13:23 PM	PHl3 MFC set to  0.000000
11/7/2011	1:13:23 PM	SiCl4 MFC set to  0.000000
11/7/2011	1:13:23 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	1:13:23 PM	Tube furnace set to 0
11/7/2011	1:33:08 PM	Helium valve closed
11/7/2011	1:33:08 PM	H2 valve closed
11/7/2011	1:33:08 PM	BCl3 valve closed
11/7/2011	1:33:08 PM	PH3 valve closed
11/7/2011	1:33:08 PM	SiCl4 pre valve closed
11/7/2011	1:33:08 PM	SiCl4 post valve closed
11/7/2011	1:33:08 PM	Main Vac valve closed
11/7/2011	1:33:08 PM	Bypass valve closed
11/7/2011	1:33:08 PM	Bubbler valve closed
11/7/2011	1:33:08 PM	Helium MFC set to  0.000000
11/7/2011	1:33:08 PM	H2 MFC set to  0.000000
11/7/2011	1:33:08 PM	BCl3 MFC set to  0.000000
11/7/2011	1:33:08 PM	PHl3 MFC set to  0.000000
11/7/2011	1:33:08 PM	SiCl4 MFC set to  0.000000
11/7/2011	1:33:08 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	1:33:09 PM	Tube furnace set to 0
11/7/2011	1:34:53 PM	Helium valve closed
11/7/2011	1:34:53 PM	H2 valve closed
11/7/2011	1:34:53 PM	BCl3 valve closed
11/7/2011	1:34:53 PM	PH3 valve closed
11/7/2011	1:34:53 PM	SiCl4 pre valve closed
11/7/2011	1:34:53 PM	SiCl4 post valve closed
11/7/2011	1:34:53 PM	Main Vac valve closed
11/7/2011	1:34:53 PM	Bubbler valve closed
11/7/2011	1:34:53 PM	Bypass valve opened
11/7/2011	1:34:53 PM	Helium MFC set to  0.000000
11/7/2011	1:34:53 PM	H2 MFC set to  0.000000
11/7/2011	1:34:53 PM	BCl3 MFC set to  0.000000
11/7/2011	1:34:53 PM	PHl3 MFC set to  0.000000
11/7/2011	1:34:53 PM	SiCl4 MFC set to  0.000000
11/7/2011	1:34:53 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	1:34:53 PM	Tube furnace set to 0
11/7/2011	1:34:55 PM	Helium valve closed
11/7/2011	1:34:55 PM	H2 valve closed
11/7/2011	1:34:55 PM	BCl3 valve closed
11/7/2011	1:34:55 PM	PH3 valve closed
11/7/2011	1:34:55 PM	SiCl4 pre valve closed
11/7/2011	1:34:55 PM	SiCl4 post valve closed
11/7/2011	1:34:55 PM	Main Vac valve closed
11/7/2011	1:34:55 PM	Bypass valve closed
11/7/2011	1:34:55 PM	Bubbler valve closed
11/7/2011	1:34:55 PM	Helium MFC set to  0.000000
11/7/2011	1:34:55 PM	H2 MFC set to  0.000000
11/7/2011	1:34:55 PM	BCl3 MFC set to  0.000000
11/7/2011	1:34:55 PM	PHl3 MFC set to  0.000000
11/7/2011	1:34:55 PM	SiCl4 MFC set to  0.000000
11/7/2011	1:34:55 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	1:34:55 PM	Tube furnace set to 0
11/7/2011	1:34:56 PM	Run finished at 1:34 PM
11/7/2011	1:34:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/7/2011	1:34:59 PM	Recipe started at 1:34 PM
11/7/2011	1:34:59 PM	Helium valve closed
11/7/2011	1:34:59 PM	H2 valve closed
11/7/2011	1:34:59 PM	BCl3 valve closed
11/7/2011	1:34:59 PM	PH3 valve closed
11/7/2011	1:34:59 PM	SiCl4 pre valve closed
11/7/2011	1:34:59 PM	SiCl4 post valve closed
11/7/2011	1:34:59 PM	Main Vac valve closed
11/7/2011	1:34:59 PM	Bubbler valve closed
11/7/2011	1:34:59 PM	Bypass valve opened
11/7/2011	1:34:59 PM	Helium MFC set to  0.000000
11/7/2011	1:34:59 PM	H2 MFC set to  0.000000
11/7/2011	1:34:59 PM	BCl3 MFC set to  0.000000
11/7/2011	1:34:59 PM	PHl3 MFC set to  0.000000
11/7/2011	1:34:59 PM	SiCl4 MFC set to  0.000000
11/7/2011	1:34:59 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	1:34:59 PM	Tube furnace set to 0
11/7/2011	1:36:04 PM	Helium valve closed
11/7/2011	1:36:04 PM	H2 valve closed
11/7/2011	1:36:04 PM	BCl3 valve closed
11/7/2011	1:36:04 PM	PH3 valve closed
11/7/2011	1:36:04 PM	SiCl4 pre valve closed
11/7/2011	1:36:04 PM	SiCl4 post valve closed
11/7/2011	1:36:04 PM	Main Vac valve closed
11/7/2011	1:36:04 PM	Bubbler valve closed
11/7/2011	1:36:04 PM	Bypass valve opened
11/7/2011	1:36:04 PM	Helium MFC set to  0.000000
11/7/2011	1:36:04 PM	H2 MFC set to  0.000000
11/7/2011	1:36:04 PM	BCl3 MFC set to  0.000000
11/7/2011	1:36:04 PM	PHl3 MFC set to  0.000000
11/7/2011	1:36:04 PM	SiCl4 MFC set to  0.000000
11/7/2011	1:36:04 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	1:36:05 PM	Tube furnace set to 0
11/7/2011	1:37:05 PM	Helium valve closed
11/7/2011	1:37:05 PM	H2 valve closed
11/7/2011	1:37:05 PM	BCl3 valve closed
11/7/2011	1:37:05 PM	PH3 valve closed
11/7/2011	1:37:05 PM	SiCl4 pre valve closed
11/7/2011	1:37:05 PM	SiCl4 post valve closed
11/7/2011	1:37:05 PM	Bypass valve closed
11/7/2011	1:37:05 PM	Bubbler valve closed
11/7/2011	1:37:05 PM	Main Vac valve opened
11/7/2011	1:37:05 PM	Helium MFC set to  0.000000
11/7/2011	1:37:05 PM	H2 MFC set to  0.000000
11/7/2011	1:37:05 PM	BCl3 MFC set to  0.000000
11/7/2011	1:37:05 PM	PHl3 MFC set to  0.000000
11/7/2011	1:37:05 PM	SiCl4 MFC set to  0.000000
11/7/2011	1:37:05 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	1:37:05 PM	Tube furnace set to 0
11/7/2011	1:37:06 PM	Run finished at 1:37 PM
11/7/2011	1:37:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/7/2011	1:39:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/7/2011	1:39:56 PM	Recipe started at 1:39 PM
11/7/2011	1:39:56 PM	Helium valve closed
11/7/2011	1:39:56 PM	H2 valve closed
11/7/2011	1:39:56 PM	BCl3 valve closed
11/7/2011	1:39:56 PM	PH3 valve closed
11/7/2011	1:39:56 PM	SiCl4 pre valve closed
11/7/2011	1:39:56 PM	SiCl4 post valve closed
11/7/2011	1:39:56 PM	Main Vac valve closed
11/7/2011	1:39:56 PM	Bypass valve closed
11/7/2011	1:39:56 PM	Bubbler valve closed
11/7/2011	1:39:56 PM	Helium MFC set to  0.000000
11/7/2011	1:39:56 PM	H2 MFC set to  0.000000
11/7/2011	1:39:56 PM	BCl3 MFC set to  0.000000
11/7/2011	1:39:56 PM	PHl3 MFC set to  0.000000
11/7/2011	1:39:56 PM	SiCl4 MFC set to  0.000000
11/7/2011	1:39:56 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	1:39:56 PM	Tube furnace set to 0
11/7/2011	1:39:59 PM	H2 valve closed
11/7/2011	1:39:59 PM	BCl3 valve closed
11/7/2011	1:39:59 PM	PH3 valve closed
11/7/2011	1:39:59 PM	SiCl4 pre valve closed
11/7/2011	1:39:59 PM	SiCl4 post valve closed
11/7/2011	1:39:59 PM	Main Vac valve closed
11/7/2011	1:39:59 PM	Bypass valve closed
11/7/2011	1:39:59 PM	Bubbler valve closed
11/7/2011	1:39:59 PM	Helium valve opened
11/7/2011	1:39:59 PM	Helium MFC set to  500.000000
11/7/2011	1:39:59 PM	H2 MFC set to  0.000000
11/7/2011	1:39:59 PM	BCl3 MFC set to  0.000000
11/7/2011	1:39:59 PM	PHl3 MFC set to  0.000000
11/7/2011	1:39:59 PM	SiCl4 MFC set to  0.000000
11/7/2011	1:39:59 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	1:39:59 PM	Tube furnace set to 0
11/7/2011	1:41:03 PM	Helium valve closed
11/7/2011	1:41:03 PM	H2 valve closed
11/7/2011	1:41:03 PM	BCl3 valve closed
11/7/2011	1:41:03 PM	PH3 valve closed
11/7/2011	1:41:03 PM	SiCl4 pre valve closed
11/7/2011	1:41:03 PM	SiCl4 post valve closed
11/7/2011	1:41:03 PM	Main Vac valve closed
11/7/2011	1:41:03 PM	Bypass valve closed
11/7/2011	1:41:03 PM	Bubbler valve closed
11/7/2011	1:41:03 PM	Helium MFC set to  0.000000
11/7/2011	1:41:03 PM	H2 MFC set to  0.000000
11/7/2011	1:41:03 PM	BCl3 MFC set to  0.000000
11/7/2011	1:41:03 PM	PHl3 MFC set to  0.000000
11/7/2011	1:41:03 PM	SiCl4 MFC set to  0.000000
11/7/2011	1:41:03 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	1:41:03 PM	Tube furnace set to 0
11/7/2011	1:41:04 PM	Run finished at 1:41 PM
11/7/2011	1:41:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/7/2011	1:42:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/7/2011	1:42:54 PM	Recipe started at 1:42 PM
11/7/2011	1:42:54 PM	Helium valve closed
11/7/2011	1:42:54 PM	H2 valve closed
11/7/2011	1:42:54 PM	BCl3 valve closed
11/7/2011	1:42:54 PM	PH3 valve closed
11/7/2011	1:42:54 PM	SiCl4 pre valve closed
11/7/2011	1:42:54 PM	SiCl4 post valve closed
11/7/2011	1:42:54 PM	Main Vac valve closed
11/7/2011	1:42:54 PM	Bubbler valve closed
11/7/2011	1:42:54 PM	Bypass valve opened
11/7/2011	1:42:54 PM	Helium MFC set to  0.000000
11/7/2011	1:42:54 PM	H2 MFC set to  0.000000
11/7/2011	1:42:54 PM	BCl3 MFC set to  0.000000
11/7/2011	1:42:54 PM	PHl3 MFC set to  0.000000
11/7/2011	1:42:54 PM	SiCl4 MFC set to  0.000000
11/7/2011	1:42:54 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	1:42:55 PM	Tube furnace set to 0
11/7/2011	1:43:59 PM	Helium valve closed
11/7/2011	1:43:59 PM	H2 valve closed
11/7/2011	1:43:59 PM	BCl3 valve closed
11/7/2011	1:43:59 PM	PH3 valve closed
11/7/2011	1:43:59 PM	SiCl4 pre valve closed
11/7/2011	1:43:59 PM	SiCl4 post valve closed
11/7/2011	1:43:59 PM	Main Vac valve closed
11/7/2011	1:43:59 PM	Bubbler valve closed
11/7/2011	1:43:59 PM	Bypass valve opened
11/7/2011	1:43:59 PM	Helium MFC set to  0.000000
11/7/2011	1:43:59 PM	H2 MFC set to  0.000000
11/7/2011	1:43:59 PM	BCl3 MFC set to  0.000000
11/7/2011	1:43:59 PM	PHl3 MFC set to  0.000000
11/7/2011	1:43:59 PM	SiCl4 MFC set to  0.000000
11/7/2011	1:43:59 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	1:43:59 PM	Tube furnace set to 0
11/7/2011	1:44:59 PM	Helium valve closed
11/7/2011	1:44:59 PM	H2 valve closed
11/7/2011	1:44:59 PM	BCl3 valve closed
11/7/2011	1:44:59 PM	PH3 valve closed
11/7/2011	1:44:59 PM	SiCl4 pre valve closed
11/7/2011	1:44:59 PM	SiCl4 post valve closed
11/7/2011	1:44:59 PM	Bypass valve closed
11/7/2011	1:44:59 PM	Bubbler valve closed
11/7/2011	1:44:59 PM	Main Vac valve opened
11/7/2011	1:44:59 PM	Helium MFC set to  0.000000
11/7/2011	1:44:59 PM	H2 MFC set to  0.000000
11/7/2011	1:44:59 PM	BCl3 MFC set to  0.000000
11/7/2011	1:44:59 PM	PHl3 MFC set to  0.000000
11/7/2011	1:44:59 PM	SiCl4 MFC set to  0.000000
11/7/2011	1:44:59 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	1:44:59 PM	Tube furnace set to 0
11/7/2011	1:45:00 PM	Run finished at 1:45 PM
11/7/2011	1:45:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/7/2011	2:37:52 PM	Tube furnace set to 50
11/7/2011	2:38:03 PM	Main Vac valve closed
11/7/2011	2:38:17 PM	Main Vac valve opened
11/7/2011	2:38:17 PM	Main Vac valve closed
11/7/2011	2:38:18 PM	Main Vac valve opened
11/7/2011	2:38:22 PM	Helium MFC set to  20.000000
11/7/2011	2:38:24 PM	Helium valve opened
11/7/2011	2:39:04 PM	Helium valve closed
11/7/2011	2:39:08 PM	Helium MFC set to  0.000000
11/7/2011	2:39:49 PM	Recipe started at 2:39 PM
11/7/2011	2:39:49 PM	H2 valve closed
11/7/2011	2:39:49 PM	BCl3 valve closed
11/7/2011	2:39:49 PM	PH3 valve closed
11/7/2011	2:39:49 PM	SiCl4 pre valve closed
11/7/2011	2:39:49 PM	SiCl4 post valve closed
11/7/2011	2:39:49 PM	Main Vac valve closed
11/7/2011	2:39:49 PM	Bypass valve closed
11/7/2011	2:39:49 PM	Bubbler valve closed
11/7/2011	2:39:49 PM	Helium valve opened
11/7/2011	2:39:49 PM	Helium MFC set to  0.000000
11/7/2011	2:39:49 PM	H2 MFC set to  0.000000
11/7/2011	2:39:49 PM	BCl3 MFC set to  0.000000
11/7/2011	2:39:49 PM	PHl3 MFC set to  0.000000
11/7/2011	2:39:49 PM	SiCl4 MFC set to  0.000000
11/7/2011	2:39:49 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	2:39:49 PM	Tube furnace set to 0
11/7/2011	2:39:52 PM	Helium valve closed
11/7/2011	2:39:52 PM	BCl3 valve closed
11/7/2011	2:39:52 PM	PH3 valve closed
11/7/2011	2:39:52 PM	SiCl4 pre valve closed
11/7/2011	2:39:52 PM	SiCl4 post valve closed
11/7/2011	2:39:52 PM	Main Vac valve closed
11/7/2011	2:39:52 PM	Bypass valve closed
11/7/2011	2:39:52 PM	Bubbler valve closed
11/7/2011	2:39:52 PM	H2 valve opened
11/7/2011	2:39:52 PM	Helium MFC set to  0.000000
11/7/2011	2:39:52 PM	H2 MFC set to  500.000000
11/7/2011	2:39:52 PM	BCl3 MFC set to  0.000000
11/7/2011	2:39:52 PM	PHl3 MFC set to  0.000000
11/7/2011	2:39:52 PM	SiCl4 MFC set to  0.000000
11/7/2011	2:39:52 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	2:39:52 PM	Tube furnace set to 100
11/7/2011	2:41:00 PM	Helium valve closed
11/7/2011	2:41:00 PM	BCl3 valve closed
11/7/2011	2:41:00 PM	PH3 valve closed
11/7/2011	2:41:00 PM	SiCl4 pre valve closed
11/7/2011	2:41:00 PM	SiCl4 post valve closed
11/7/2011	2:41:00 PM	Main Vac valve closed
11/7/2011	2:41:00 PM	Bypass valve closed
11/7/2011	2:41:00 PM	H2 valve opened
11/7/2011	2:41:00 PM	Bubbler valve opened
11/7/2011	2:41:00 PM	Helium MFC set to  0.000000
11/7/2011	2:41:00 PM	H2 MFC set to  500.000000
11/7/2011	2:41:00 PM	BCl3 MFC set to  0.000000
11/7/2011	2:41:00 PM	PHl3 MFC set to  0.000000
11/7/2011	2:41:00 PM	SiCl4 MFC set to  0.000000
11/7/2011	2:41:00 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	2:41:00 PM	Tube furnace set to 1000
11/7/2011	2:41:01 PM	Helium valve closed
11/7/2011	2:41:01 PM	BCl3 valve closed
11/7/2011	2:41:01 PM	PH3 valve closed
11/7/2011	2:41:01 PM	SiCl4 pre valve closed
11/7/2011	2:41:01 PM	SiCl4 post valve closed
11/7/2011	2:41:01 PM	Main Vac valve closed
11/7/2011	2:41:01 PM	Bypass valve closed
11/7/2011	2:41:01 PM	H2 valve opened
11/7/2011	2:41:01 PM	Bubbler valve opened
11/7/2011	2:41:01 PM	Helium MFC set to  0.000000
11/7/2011	2:41:01 PM	H2 MFC set to  500.000000
11/7/2011	2:41:01 PM	BCl3 MFC set to  0.000000
11/7/2011	2:41:01 PM	PHl3 MFC set to  0.000000
11/7/2011	2:41:01 PM	SiCl4 MFC set to  0.000000
11/7/2011	2:41:01 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	2:41:01 PM	Tube furnace set to 1000
11/7/2011	3:05:01 PM	Helium valve closed
11/7/2011	3:05:01 PM	PH3 valve closed
11/7/2011	3:05:01 PM	Main Vac valve closed
11/7/2011	3:05:01 PM	Bypass valve closed
11/7/2011	3:05:01 PM	H2 valve opened
11/7/2011	3:05:01 PM	BCl3 valve opened
11/7/2011	3:05:01 PM	SiCl4 pre valve opened
11/7/2011	3:05:01 PM	SiCl4 post valve opened
11/7/2011	3:05:01 PM	Bubbler valve opened
11/7/2011	3:05:01 PM	Helium MFC set to  0.000000
11/7/2011	3:05:01 PM	H2 MFC set to  500.000000
11/7/2011	3:05:01 PM	BCl3 MFC set to  1.800000
11/7/2011	3:05:01 PM	PHl3 MFC set to  0.000000
11/7/2011	3:05:01 PM	SiCl4 MFC set to  18.000000
11/7/2011	3:05:01 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	3:05:01 PM	Tube furnace set to 1000
11/7/2011	3:23:01 PM	Helium valve closed
11/7/2011	3:23:01 PM	BCl3 valve closed
11/7/2011	3:23:01 PM	PH3 valve closed
11/7/2011	3:23:01 PM	SiCl4 pre valve closed
11/7/2011	3:23:01 PM	SiCl4 post valve closed
11/7/2011	3:23:01 PM	Main Vac valve closed
11/7/2011	3:23:01 PM	Bypass valve closed
11/7/2011	3:23:01 PM	H2 valve opened
11/7/2011	3:23:01 PM	Bubbler valve opened
11/7/2011	3:23:01 PM	Helium MFC set to  0.000000
11/7/2011	3:23:01 PM	H2 MFC set to  500.000000
11/7/2011	3:23:01 PM	BCl3 MFC set to  0.000000
11/7/2011	3:23:01 PM	PHl3 MFC set to  0.000000
11/7/2011	3:23:01 PM	SiCl4 MFC set to  0.000000
11/7/2011	3:23:01 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	3:23:02 PM	Tube furnace set to 750
11/7/2011	3:33:02 PM	H2 valve closed
11/7/2011	3:33:02 PM	BCl3 valve closed
11/7/2011	3:33:02 PM	PH3 valve closed
11/7/2011	3:33:02 PM	SiCl4 pre valve closed
11/7/2011	3:33:02 PM	SiCl4 post valve closed
11/7/2011	3:33:02 PM	Main Vac valve closed
11/7/2011	3:33:02 PM	Bypass valve closed
11/7/2011	3:33:02 PM	Helium valve opened
11/7/2011	3:33:02 PM	Bubbler valve opened
11/7/2011	3:33:02 PM	Helium MFC set to  400.000000
11/7/2011	3:33:02 PM	H2 MFC set to  0.000000
11/7/2011	3:33:02 PM	BCl3 MFC set to  0.000000
11/7/2011	3:33:02 PM	PHl3 MFC set to  0.000000
11/7/2011	3:33:02 PM	SiCl4 MFC set to  0.000000
11/7/2011	3:33:02 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	3:33:02 PM	Tube furnace set to 0
11/7/2011	3:53:02 PM	Helium valve closed
11/7/2011	3:53:02 PM	H2 valve closed
11/7/2011	3:53:02 PM	BCl3 valve closed
11/7/2011	3:53:02 PM	PH3 valve closed
11/7/2011	3:53:02 PM	SiCl4 pre valve closed
11/7/2011	3:53:02 PM	SiCl4 post valve closed
11/7/2011	3:53:02 PM	Main Vac valve closed
11/7/2011	3:53:02 PM	Bypass valve closed
11/7/2011	3:53:02 PM	Bubbler valve closed
11/7/2011	3:53:02 PM	Helium MFC set to  0.000000
11/7/2011	3:53:02 PM	H2 MFC set to  0.000000
11/7/2011	3:53:02 PM	BCl3 MFC set to  0.000000
11/7/2011	3:53:02 PM	PHl3 MFC set to  0.000000
11/7/2011	3:53:02 PM	SiCl4 MFC set to  0.000000
11/7/2011	3:53:02 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	3:53:02 PM	Tube furnace set to 0
11/7/2011	3:55:46 PM	Run aborted at 3:55 PM
11/7/2011	3:55:46 PM	Helium valve closed
11/7/2011	3:55:46 PM	H2 valve closed
11/7/2011	3:55:46 PM	BCl3 valve closed
11/7/2011	3:55:46 PM	PH3 valve closed
11/7/2011	3:55:46 PM	SiCl4 pre valve closed
11/7/2011	3:55:46 PM	SiCl4 post valve closed
11/7/2011	3:55:46 PM	Bypass valve closed
11/7/2011	3:55:46 PM	Main Vac valve closed
11/7/2011	3:55:46 PM	Bubbler valve closed
11/7/2011	3:55:46 PM	Helium MFC set to  0.000000
11/7/2011	3:55:46 PM	H2 MFC set to  0.000000
11/7/2011	3:55:46 PM	BCl3 MFC set to  0.000000
11/7/2011	3:55:46 PM	PHl3 MFC set to  0.000000
11/7/2011	3:55:46 PM	SiCl4 MFC set to  0.000000
11/7/2011	3:55:47 PM	Tube furnace set to 0
11/7/2011	3:58:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/7/2011	3:58:43 PM	Recipe started at 3:58 PM
11/7/2011	3:58:43 PM	Helium valve closed
11/7/2011	3:58:43 PM	H2 valve closed
11/7/2011	3:58:43 PM	BCl3 valve closed
11/7/2011	3:58:43 PM	PH3 valve closed
11/7/2011	3:58:43 PM	SiCl4 pre valve closed
11/7/2011	3:58:43 PM	SiCl4 post valve closed
11/7/2011	3:58:43 PM	Main Vac valve closed
11/7/2011	3:58:43 PM	Bubbler valve closed
11/7/2011	3:58:43 PM	Bypass valve opened
11/7/2011	3:58:43 PM	Helium MFC set to  0.000000
11/7/2011	3:58:43 PM	H2 MFC set to  0.000000
11/7/2011	3:58:43 PM	BCl3 MFC set to  0.000000
11/7/2011	3:58:43 PM	PHl3 MFC set to  0.000000
11/7/2011	3:58:43 PM	SiCl4 MFC set to  0.000000
11/7/2011	3:58:43 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	3:58:43 PM	Tube furnace set to 0
11/7/2011	3:59:51 PM	Helium valve closed
11/7/2011	3:59:51 PM	H2 valve closed
11/7/2011	3:59:51 PM	BCl3 valve closed
11/7/2011	3:59:51 PM	PH3 valve closed
11/7/2011	3:59:51 PM	SiCl4 pre valve closed
11/7/2011	3:59:51 PM	SiCl4 post valve closed
11/7/2011	3:59:51 PM	Main Vac valve closed
11/7/2011	3:59:51 PM	Bubbler valve closed
11/7/2011	3:59:51 PM	Bypass valve opened
11/7/2011	3:59:51 PM	Helium MFC set to  0.000000
11/7/2011	3:59:51 PM	H2 MFC set to  0.000000
11/7/2011	3:59:51 PM	BCl3 MFC set to  0.000000
11/7/2011	3:59:51 PM	PHl3 MFC set to  0.000000
11/7/2011	3:59:51 PM	SiCl4 MFC set to  0.000000
11/7/2011	3:59:51 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	3:59:51 PM	Tube furnace set to 0
11/7/2011	4:00:51 PM	Helium valve closed
11/7/2011	4:00:51 PM	H2 valve closed
11/7/2011	4:00:51 PM	BCl3 valve closed
11/7/2011	4:00:51 PM	PH3 valve closed
11/7/2011	4:00:51 PM	SiCl4 pre valve closed
11/7/2011	4:00:51 PM	SiCl4 post valve closed
11/7/2011	4:00:51 PM	Bypass valve closed
11/7/2011	4:00:51 PM	Bubbler valve closed
11/7/2011	4:00:51 PM	Main Vac valve opened
11/7/2011	4:00:51 PM	Helium MFC set to  0.000000
11/7/2011	4:00:51 PM	H2 MFC set to  0.000000
11/7/2011	4:00:51 PM	BCl3 MFC set to  0.000000
11/7/2011	4:00:51 PM	PHl3 MFC set to  0.000000
11/7/2011	4:00:51 PM	SiCl4 MFC set to  0.000000
11/7/2011	4:00:51 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	4:00:51 PM	Tube furnace set to 0
11/7/2011	4:00:52 PM	Run finished at 4:00 PM
11/7/2011	4:00:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/7/2011	4:18:09 PM	Helium MFC set to  20.000000
11/7/2011	4:18:10 PM	Helium valve opened
11/7/2011	4:19:59 PM	Helium valve closed
11/7/2011	4:20:01 PM	Helium MFC set to  20.000000
11/7/2011	4:24:32 PM	Helium valve opened
11/7/2011	4:25:35 PM	Helium valve closed
11/7/2011	4:40:05 PM	Main Vac valve closed
11/7/2011	4:40:32 PM	Helium valve opened
11/7/2011	4:40:33 PM	Helium valve closed
11/7/2011	4:40:38 PM	Main Vac valve opened
11/7/2011	4:40:41 PM	Helium valve opened
11/7/2011	4:40:53 PM	Helium valve closed
11/7/2011	4:42:00 PM	Main Vac valve closed
11/7/2011	4:42:16 PM	Main Vac valve opened
11/7/2011	4:42:57 PM	Helium valve opened
11/7/2011	4:43:16 PM	Helium valve closed
11/7/2011	4:43:19 PM	Helium MFC set to  0.000000
11/7/2011	4:44:05 PM	Main Vac valve closed
11/7/2011	4:44:32 PM	Main Vac valve opened
11/7/2011	4:44:36 PM	Helium MFC set to  20.000000
11/7/2011	4:44:37 PM	Helium valve opened
11/7/2011	4:45:09 PM	Helium valve closed
11/7/2011	4:45:48 PM	Helium valve opened
11/7/2011	4:46:30 PM	Helium valve closed
11/7/2011	4:48:05 PM	Main Vac valve closed
11/7/2011	4:48:28 PM	Main Vac valve opened
11/7/2011	4:48:32 PM	Helium MFC set to  0.000000
11/7/2011	4:48:55 PM	Recipe started at 4:48 PM
11/7/2011	4:48:55 PM	H2 valve closed
11/7/2011	4:48:55 PM	BCl3 valve closed
11/7/2011	4:48:55 PM	PH3 valve closed
11/7/2011	4:48:55 PM	SiCl4 pre valve closed
11/7/2011	4:48:55 PM	SiCl4 post valve closed
11/7/2011	4:48:55 PM	Main Vac valve closed
11/7/2011	4:48:55 PM	Bypass valve closed
11/7/2011	4:48:55 PM	Bubbler valve closed
11/7/2011	4:48:55 PM	Helium valve opened
11/7/2011	4:48:55 PM	Helium MFC set to  0.000000
11/7/2011	4:48:55 PM	H2 MFC set to  0.000000
11/7/2011	4:48:56 PM	BCl3 MFC set to  0.000000
11/7/2011	4:48:56 PM	PHl3 MFC set to  0.000000
11/7/2011	4:48:56 PM	SiCl4 MFC set to  0.000000
11/7/2011	4:48:56 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	4:48:56 PM	Tube furnace set to 0
11/7/2011	4:48:59 PM	Helium valve closed
11/7/2011	4:48:59 PM	BCl3 valve closed
11/7/2011	4:48:59 PM	PH3 valve closed
11/7/2011	4:48:59 PM	SiCl4 pre valve closed
11/7/2011	4:48:59 PM	SiCl4 post valve closed
11/7/2011	4:48:59 PM	Main Vac valve closed
11/7/2011	4:48:59 PM	Bypass valve closed
11/7/2011	4:48:59 PM	Bubbler valve closed
11/7/2011	4:48:59 PM	H2 valve opened
11/7/2011	4:48:59 PM	Helium MFC set to  0.000000
11/7/2011	4:48:59 PM	H2 MFC set to  500.000000
11/7/2011	4:48:59 PM	BCl3 MFC set to  0.000000
11/7/2011	4:48:59 PM	PHl3 MFC set to  0.000000
11/7/2011	4:48:59 PM	SiCl4 MFC set to  0.000000
11/7/2011	4:48:59 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	4:48:59 PM	Tube furnace set to 100
11/7/2011	4:50:05 PM	Helium valve closed
11/7/2011	4:50:05 PM	BCl3 valve closed
11/7/2011	4:50:05 PM	PH3 valve closed
11/7/2011	4:50:05 PM	SiCl4 pre valve closed
11/7/2011	4:50:05 PM	SiCl4 post valve closed
11/7/2011	4:50:05 PM	Main Vac valve closed
11/7/2011	4:50:05 PM	Bypass valve closed
11/7/2011	4:50:05 PM	H2 valve opened
11/7/2011	4:50:05 PM	Bubbler valve opened
11/7/2011	4:50:05 PM	Helium MFC set to  0.000000
11/7/2011	4:50:05 PM	H2 MFC set to  500.000000
11/7/2011	4:50:05 PM	BCl3 MFC set to  0.000000
11/7/2011	4:50:05 PM	PHl3 MFC set to  0.000000
11/7/2011	4:50:05 PM	SiCl4 MFC set to  0.000000
11/7/2011	4:50:05 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	4:50:05 PM	Tube furnace set to 1000
11/7/2011	4:50:06 PM	Helium valve closed
11/7/2011	4:50:06 PM	BCl3 valve closed
11/7/2011	4:50:06 PM	PH3 valve closed
11/7/2011	4:50:06 PM	SiCl4 pre valve closed
11/7/2011	4:50:06 PM	SiCl4 post valve closed
11/7/2011	4:50:06 PM	Main Vac valve closed
11/7/2011	4:50:06 PM	Bypass valve closed
11/7/2011	4:50:06 PM	H2 valve opened
11/7/2011	4:50:06 PM	Bubbler valve opened
11/7/2011	4:50:06 PM	Helium MFC set to  0.000000
11/7/2011	4:50:06 PM	H2 MFC set to  450.000000
11/7/2011	4:50:06 PM	BCl3 MFC set to  0.000000
11/7/2011	4:50:06 PM	PHl3 MFC set to  0.000000
11/7/2011	4:50:06 PM	SiCl4 MFC set to  0.000000
11/7/2011	4:50:06 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	4:50:07 PM	Tube furnace set to 1000
11/7/2011	5:13:06 PM	Helium valve closed
11/7/2011	5:13:06 PM	PH3 valve closed
11/7/2011	5:13:06 PM	Main Vac valve closed
11/7/2011	5:13:06 PM	Bypass valve closed
11/7/2011	5:13:06 PM	H2 valve opened
11/7/2011	5:13:06 PM	BCl3 valve opened
11/7/2011	5:13:07 PM	SiCl4 pre valve opened
11/7/2011	5:13:07 PM	SiCl4 post valve opened
11/7/2011	5:13:07 PM	Bubbler valve opened
11/7/2011	5:13:07 PM	Helium MFC set to  0.000000
11/7/2011	5:13:07 PM	H2 MFC set to  500.000000
11/7/2011	5:13:07 PM	BCl3 MFC set to  1.000000
11/7/2011	5:13:07 PM	PHl3 MFC set to  0.000000
11/7/2011	5:13:07 PM	SiCl4 MFC set to  18.500000
11/7/2011	5:13:07 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	5:13:07 PM	Tube furnace set to 1000
11/7/2011	5:31:07 PM	Helium valve closed
11/7/2011	5:31:07 PM	BCl3 valve closed
11/7/2011	5:31:07 PM	PH3 valve closed
11/7/2011	5:31:07 PM	SiCl4 pre valve closed
11/7/2011	5:31:07 PM	SiCl4 post valve closed
11/7/2011	5:31:07 PM	Main Vac valve closed
11/7/2011	5:31:07 PM	Bypass valve closed
11/7/2011	5:31:07 PM	H2 valve opened
11/7/2011	5:31:07 PM	Bubbler valve opened
11/7/2011	5:31:07 PM	Helium MFC set to  0.000000
11/7/2011	5:31:07 PM	H2 MFC set to  450.000000
11/7/2011	5:31:07 PM	BCl3 MFC set to  0.000000
11/7/2011	5:31:07 PM	PHl3 MFC set to  0.000000
11/7/2011	5:31:07 PM	SiCl4 MFC set to  0.000000
11/7/2011	5:31:07 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	5:31:07 PM	Tube furnace set to 750
11/7/2011	5:41:07 PM	H2 valve closed
11/7/2011	5:41:07 PM	BCl3 valve closed
11/7/2011	5:41:07 PM	PH3 valve closed
11/7/2011	5:41:07 PM	SiCl4 pre valve closed
11/7/2011	5:41:07 PM	SiCl4 post valve closed
11/7/2011	5:41:07 PM	Main Vac valve closed
11/7/2011	5:41:07 PM	Bypass valve closed
11/7/2011	5:41:07 PM	Helium valve opened
11/7/2011	5:41:07 PM	Bubbler valve opened
11/7/2011	5:41:07 PM	Helium MFC set to  400.000000
11/7/2011	5:41:07 PM	H2 MFC set to  0.000000
11/7/2011	5:41:07 PM	BCl3 MFC set to  0.000000
11/7/2011	5:41:07 PM	PHl3 MFC set to  0.000000
11/7/2011	5:41:07 PM	SiCl4 MFC set to  0.000000
11/7/2011	5:41:07 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	5:41:07 PM	Tube furnace set to 0
11/7/2011	6:00:17 PM	Helium valve closed
11/7/2011	6:00:17 PM	H2 valve closed
11/7/2011	6:00:17 PM	BCl3 valve closed
11/7/2011	6:00:17 PM	PH3 valve closed
11/7/2011	6:00:17 PM	SiCl4 pre valve closed
11/7/2011	6:00:17 PM	SiCl4 post valve closed
11/7/2011	6:00:17 PM	Main Vac valve closed
11/7/2011	6:00:17 PM	Bypass valve closed
11/7/2011	6:00:17 PM	Bubbler valve closed
11/7/2011	6:00:17 PM	Helium MFC set to  0.000000
11/7/2011	6:00:17 PM	H2 MFC set to  0.000000
11/7/2011	6:00:17 PM	BCl3 MFC set to  0.000000
11/7/2011	6:00:17 PM	PHl3 MFC set to  0.000000
11/7/2011	6:00:17 PM	SiCl4 MFC set to  0.000000
11/7/2011	6:00:17 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	6:00:17 PM	Tube furnace set to 0
11/7/2011	6:00:21 PM	Run aborted at 6:00 PM
11/7/2011	6:00:21 PM	Helium valve closed
11/7/2011	6:00:21 PM	H2 valve closed
11/7/2011	6:00:21 PM	BCl3 valve closed
11/7/2011	6:00:21 PM	PH3 valve closed
11/7/2011	6:00:21 PM	SiCl4 pre valve closed
11/7/2011	6:00:21 PM	SiCl4 post valve closed
11/7/2011	6:00:21 PM	Bypass valve closed
11/7/2011	6:00:21 PM	Main Vac valve closed
11/7/2011	6:00:21 PM	Bubbler valve closed
11/7/2011	6:00:21 PM	Helium MFC set to  0.000000
11/7/2011	6:00:21 PM	H2 MFC set to  0.000000
11/7/2011	6:00:21 PM	BCl3 MFC set to  0.000000
11/7/2011	6:00:21 PM	PHl3 MFC set to  0.000000
11/7/2011	6:00:21 PM	SiCl4 MFC set to  0.000000
11/7/2011	6:00:22 PM	Tube furnace set to 0
11/7/2011	6:03:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/7/2011	6:03:35 PM	Recipe started at 6:03 PM
11/7/2011	6:03:35 PM	Helium valve closed
11/7/2011	6:03:35 PM	H2 valve closed
11/7/2011	6:03:35 PM	BCl3 valve closed
11/7/2011	6:03:35 PM	PH3 valve closed
11/7/2011	6:03:35 PM	SiCl4 pre valve closed
11/7/2011	6:03:35 PM	SiCl4 post valve closed
11/7/2011	6:03:35 PM	Main Vac valve closed
11/7/2011	6:03:35 PM	Bubbler valve closed
11/7/2011	6:03:35 PM	Bypass valve opened
11/7/2011	6:03:35 PM	Helium MFC set to  0.000000
11/7/2011	6:03:35 PM	H2 MFC set to  0.000000
11/7/2011	6:03:35 PM	BCl3 MFC set to  0.000000
11/7/2011	6:03:35 PM	PHl3 MFC set to  0.000000
11/7/2011	6:03:35 PM	SiCl4 MFC set to  0.000000
11/7/2011	6:03:35 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	6:03:35 PM	Tube furnace set to 0
11/7/2011	6:04:41 PM	Helium valve closed
11/7/2011	6:04:41 PM	H2 valve closed
11/7/2011	6:04:41 PM	BCl3 valve closed
11/7/2011	6:04:41 PM	PH3 valve closed
11/7/2011	6:04:41 PM	SiCl4 pre valve closed
11/7/2011	6:04:41 PM	SiCl4 post valve closed
11/7/2011	6:04:41 PM	Main Vac valve closed
11/7/2011	6:04:41 PM	Bubbler valve closed
11/7/2011	6:04:41 PM	Bypass valve opened
11/7/2011	6:04:41 PM	Helium MFC set to  0.000000
11/7/2011	6:04:41 PM	H2 MFC set to  0.000000
11/7/2011	6:04:41 PM	BCl3 MFC set to  0.000000
11/7/2011	6:04:41 PM	PHl3 MFC set to  0.000000
11/7/2011	6:04:41 PM	SiCl4 MFC set to  0.000000
11/7/2011	6:04:41 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	6:04:41 PM	Tube furnace set to 0
11/7/2011	6:05:41 PM	Helium valve closed
11/7/2011	6:05:41 PM	H2 valve closed
11/7/2011	6:05:41 PM	BCl3 valve closed
11/7/2011	6:05:41 PM	PH3 valve closed
11/7/2011	6:05:41 PM	SiCl4 pre valve closed
11/7/2011	6:05:41 PM	SiCl4 post valve closed
11/7/2011	6:05:41 PM	Bypass valve closed
11/7/2011	6:05:41 PM	Bubbler valve closed
11/7/2011	6:05:41 PM	Main Vac valve opened
11/7/2011	6:05:41 PM	Helium MFC set to  0.000000
11/7/2011	6:05:41 PM	H2 MFC set to  0.000000
11/7/2011	6:05:41 PM	BCl3 MFC set to  0.000000
11/7/2011	6:05:41 PM	PHl3 MFC set to  0.000000
11/7/2011	6:05:41 PM	SiCl4 MFC set to  0.000000
11/7/2011	6:05:41 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	6:05:42 PM	Tube furnace set to 0
11/7/2011	6:05:43 PM	Run finished at 6:05 PM
11/7/2011	6:05:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/7/2011	6:12:52 PM	Helium MFC set to  30.000000
11/7/2011	6:12:56 PM	Helium valve opened
11/7/2011	6:13:22 PM	Helium valve closed
11/7/2011	6:13:27 PM	Helium MFC set to  0.000000
11/7/2011	7:15:02 PM	Main Vac valve closed
11/7/2011	7:15:09 PM	Tube furnace set to 50
11/7/2011	7:15:26 PM	Main Vac valve opened
11/7/2011	7:16:27 PM	Recipe started at 7:16 PM
11/7/2011	7:16:27 PM	H2 valve closed
11/7/2011	7:16:27 PM	BCl3 valve closed
11/7/2011	7:16:27 PM	PH3 valve closed
11/7/2011	7:16:27 PM	SiCl4 pre valve closed
11/7/2011	7:16:27 PM	SiCl4 post valve closed
11/7/2011	7:16:28 PM	Main Vac valve closed
11/7/2011	7:16:28 PM	Bypass valve closed
11/7/2011	7:16:28 PM	Bubbler valve closed
11/7/2011	7:16:28 PM	Helium valve opened
11/7/2011	7:16:28 PM	Helium MFC set to  0.000000
11/7/2011	7:16:28 PM	H2 MFC set to  0.000000
11/7/2011	7:16:28 PM	BCl3 MFC set to  0.000000
11/7/2011	7:16:28 PM	PHl3 MFC set to  0.000000
11/7/2011	7:16:28 PM	SiCl4 MFC set to  0.000000
11/7/2011	7:16:28 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	7:16:28 PM	Tube furnace set to 0
11/7/2011	7:16:31 PM	Helium valve closed
11/7/2011	7:16:31 PM	BCl3 valve closed
11/7/2011	7:16:31 PM	PH3 valve closed
11/7/2011	7:16:31 PM	SiCl4 pre valve closed
11/7/2011	7:16:31 PM	SiCl4 post valve closed
11/7/2011	7:16:31 PM	Main Vac valve closed
11/7/2011	7:16:31 PM	Bypass valve closed
11/7/2011	7:16:31 PM	Bubbler valve closed
11/7/2011	7:16:31 PM	H2 valve opened
11/7/2011	7:16:31 PM	Helium MFC set to  0.000000
11/7/2011	7:16:31 PM	H2 MFC set to  500.000000
11/7/2011	7:16:31 PM	BCl3 MFC set to  0.000000
11/7/2011	7:16:31 PM	PHl3 MFC set to  0.000000
11/7/2011	7:16:31 PM	SiCl4 MFC set to  0.000000
11/7/2011	7:16:31 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	7:16:31 PM	Tube furnace set to 100
11/7/2011	7:17:39 PM	Helium valve closed
11/7/2011	7:17:39 PM	BCl3 valve closed
11/7/2011	7:17:39 PM	PH3 valve closed
11/7/2011	7:17:39 PM	SiCl4 pre valve closed
11/7/2011	7:17:39 PM	SiCl4 post valve closed
11/7/2011	7:17:39 PM	Main Vac valve closed
11/7/2011	7:17:39 PM	Bypass valve closed
11/7/2011	7:17:39 PM	H2 valve opened
11/7/2011	7:17:39 PM	Bubbler valve opened
11/7/2011	7:17:39 PM	Helium MFC set to  0.000000
11/7/2011	7:17:39 PM	H2 MFC set to  500.000000
11/7/2011	7:17:39 PM	BCl3 MFC set to  0.000000
11/7/2011	7:17:39 PM	PHl3 MFC set to  0.000000
11/7/2011	7:17:39 PM	SiCl4 MFC set to  0.000000
11/7/2011	7:17:39 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	7:17:39 PM	Tube furnace set to 1000
11/7/2011	7:17:40 PM	Helium valve closed
11/7/2011	7:17:40 PM	BCl3 valve closed
11/7/2011	7:17:40 PM	PH3 valve closed
11/7/2011	7:17:40 PM	SiCl4 pre valve closed
11/7/2011	7:17:40 PM	SiCl4 post valve closed
11/7/2011	7:17:40 PM	Main Vac valve closed
11/7/2011	7:17:40 PM	Bypass valve closed
11/7/2011	7:17:40 PM	H2 valve opened
11/7/2011	7:17:40 PM	Bubbler valve opened
11/7/2011	7:17:40 PM	Helium MFC set to  0.000000
11/7/2011	7:17:40 PM	H2 MFC set to  450.000000
11/7/2011	7:17:40 PM	BCl3 MFC set to  0.000000
11/7/2011	7:17:40 PM	PHl3 MFC set to  0.000000
11/7/2011	7:17:40 PM	SiCl4 MFC set to  0.000000
11/7/2011	7:17:40 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	7:17:40 PM	Tube furnace set to 1000
11/7/2011	7:40:40 PM	Helium valve closed
11/7/2011	7:40:40 PM	PH3 valve closed
11/7/2011	7:40:40 PM	Main Vac valve closed
11/7/2011	7:40:40 PM	Bypass valve closed
11/7/2011	7:40:40 PM	H2 valve opened
11/7/2011	7:40:40 PM	BCl3 valve opened
11/7/2011	7:40:40 PM	SiCl4 pre valve opened
11/7/2011	7:40:40 PM	SiCl4 post valve opened
11/7/2011	7:40:40 PM	Bubbler valve opened
11/7/2011	7:40:40 PM	Helium MFC set to  0.000000
11/7/2011	7:40:40 PM	H2 MFC set to  500.000000
11/7/2011	7:40:40 PM	BCl3 MFC set to  3.000000
11/7/2011	7:40:40 PM	PHl3 MFC set to  0.000000
11/7/2011	7:40:40 PM	SiCl4 MFC set to  17.500000
11/7/2011	7:40:40 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	7:40:40 PM	Tube furnace set to 1000
11/7/2011	7:58:40 PM	Helium valve closed
11/7/2011	7:58:40 PM	BCl3 valve closed
11/7/2011	7:58:40 PM	PH3 valve closed
11/7/2011	7:58:40 PM	SiCl4 pre valve closed
11/7/2011	7:58:40 PM	SiCl4 post valve closed
11/7/2011	7:58:40 PM	Main Vac valve closed
11/7/2011	7:58:40 PM	Bypass valve closed
11/7/2011	7:58:40 PM	H2 valve opened
11/7/2011	7:58:40 PM	Bubbler valve opened
11/7/2011	7:58:40 PM	Helium MFC set to  0.000000
11/7/2011	7:58:40 PM	H2 MFC set to  450.000000
11/7/2011	7:58:40 PM	BCl3 MFC set to  0.000000
11/7/2011	7:58:40 PM	PHl3 MFC set to  0.000000
11/7/2011	7:58:40 PM	SiCl4 MFC set to  0.000000
11/7/2011	7:58:40 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	7:58:40 PM	Tube furnace set to 750
11/7/2011	8:08:40 PM	H2 valve closed
11/7/2011	8:08:40 PM	BCl3 valve closed
11/7/2011	8:08:40 PM	PH3 valve closed
11/7/2011	8:08:40 PM	SiCl4 pre valve closed
11/7/2011	8:08:40 PM	SiCl4 post valve closed
11/7/2011	8:08:40 PM	Main Vac valve closed
11/7/2011	8:08:40 PM	Bypass valve closed
11/7/2011	8:08:40 PM	Helium valve opened
11/7/2011	8:08:40 PM	Bubbler valve opened
11/7/2011	8:08:40 PM	Helium MFC set to  400.000000
11/7/2011	8:08:40 PM	H2 MFC set to  0.000000
11/7/2011	8:08:40 PM	BCl3 MFC set to  0.000000
11/7/2011	8:08:40 PM	PHl3 MFC set to  0.000000
11/7/2011	8:08:40 PM	SiCl4 MFC set to  0.000000
11/7/2011	8:08:40 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	8:08:40 PM	Tube furnace set to 0
11/7/2011	8:28:40 PM	Helium valve closed
11/7/2011	8:28:40 PM	H2 valve closed
11/7/2011	8:28:40 PM	BCl3 valve closed
11/7/2011	8:28:40 PM	PH3 valve closed
11/7/2011	8:28:40 PM	SiCl4 pre valve closed
11/7/2011	8:28:40 PM	SiCl4 post valve closed
11/7/2011	8:28:40 PM	Main Vac valve closed
11/7/2011	8:28:41 PM	Bypass valve closed
11/7/2011	8:28:41 PM	Bubbler valve closed
11/7/2011	8:28:41 PM	Helium MFC set to  0.000000
11/7/2011	8:28:41 PM	H2 MFC set to  0.000000
11/7/2011	8:28:41 PM	BCl3 MFC set to  0.000000
11/7/2011	8:28:41 PM	PHl3 MFC set to  0.000000
11/7/2011	8:28:41 PM	SiCl4 MFC set to  0.000000
11/7/2011	8:28:41 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	8:28:41 PM	Tube furnace set to 0
11/7/2011	8:33:41 PM	Helium valve closed
11/7/2011	8:33:41 PM	H2 valve closed
11/7/2011	8:33:41 PM	BCl3 valve closed
11/7/2011	8:33:41 PM	PH3 valve closed
11/7/2011	8:33:41 PM	SiCl4 pre valve closed
11/7/2011	8:33:41 PM	SiCl4 post valve closed
11/7/2011	8:33:41 PM	Main Vac valve closed
11/7/2011	8:33:41 PM	Bubbler valve closed
11/7/2011	8:33:41 PM	Bypass valve opened
11/7/2011	8:33:41 PM	Helium MFC set to  0.000000
11/7/2011	8:33:41 PM	H2 MFC set to  0.000000
11/7/2011	8:33:41 PM	BCl3 MFC set to  0.000000
11/7/2011	8:33:41 PM	PHl3 MFC set to  0.000000
11/7/2011	8:33:41 PM	SiCl4 MFC set to  0.000000
11/7/2011	8:33:41 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	8:33:41 PM	Tube furnace set to 0
11/7/2011	8:34:41 PM	Helium valve closed
11/7/2011	8:34:41 PM	H2 valve closed
11/7/2011	8:34:41 PM	BCl3 valve closed
11/7/2011	8:34:41 PM	PH3 valve closed
11/7/2011	8:34:41 PM	SiCl4 pre valve closed
11/7/2011	8:34:41 PM	SiCl4 post valve closed
11/7/2011	8:34:41 PM	Main Vac valve closed
11/7/2011	8:34:41 PM	Bypass valve closed
11/7/2011	8:34:41 PM	Bubbler valve closed
11/7/2011	8:34:41 PM	Helium MFC set to  0.000000
11/7/2011	8:34:41 PM	H2 MFC set to  0.000000
11/7/2011	8:34:41 PM	BCl3 MFC set to  0.000000
11/7/2011	8:34:41 PM	PHl3 MFC set to  0.000000
11/7/2011	8:34:41 PM	SiCl4 MFC set to  0.000000
11/7/2011	8:34:41 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	8:34:41 PM	Tube furnace set to 0
11/7/2011	8:34:42 PM	Run finished at 8:34 PM
11/7/2011	9:30:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/7/2011	9:30:59 PM	Recipe started at 9:30 PM
11/7/2011	9:30:59 PM	Helium valve closed
11/7/2011	9:30:59 PM	H2 valve closed
11/7/2011	9:30:59 PM	BCl3 valve closed
11/7/2011	9:30:59 PM	PH3 valve closed
11/7/2011	9:30:59 PM	SiCl4 pre valve closed
11/7/2011	9:30:59 PM	SiCl4 post valve closed
11/7/2011	9:30:59 PM	Main Vac valve closed
11/7/2011	9:30:59 PM	Bypass valve closed
11/7/2011	9:30:59 PM	Bubbler valve closed
11/7/2011	9:30:59 PM	Helium MFC set to  0.000000
11/7/2011	9:30:59 PM	H2 MFC set to  0.000000
11/7/2011	9:30:59 PM	BCl3 MFC set to  0.000000
11/7/2011	9:30:59 PM	PHl3 MFC set to  0.000000
11/7/2011	9:30:59 PM	SiCl4 MFC set to  0.000000
11/7/2011	9:30:59 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	9:30:59 PM	Tube furnace set to 0
11/7/2011	9:31:02 PM	H2 valve closed
11/7/2011	9:31:02 PM	BCl3 valve closed
11/7/2011	9:31:02 PM	PH3 valve closed
11/7/2011	9:31:02 PM	SiCl4 pre valve closed
11/7/2011	9:31:02 PM	SiCl4 post valve closed
11/7/2011	9:31:02 PM	Main Vac valve closed
11/7/2011	9:31:02 PM	Bypass valve closed
11/7/2011	9:31:02 PM	Bubbler valve closed
11/7/2011	9:31:02 PM	Helium valve opened
11/7/2011	9:31:02 PM	Helium MFC set to  500.000000
11/7/2011	9:31:02 PM	H2 MFC set to  0.000000
11/7/2011	9:31:02 PM	BCl3 MFC set to  0.000000
11/7/2011	9:31:02 PM	PHl3 MFC set to  0.000000
11/7/2011	9:31:02 PM	SiCl4 MFC set to  0.000000
11/7/2011	9:31:02 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	9:31:03 PM	Tube furnace set to 0
11/7/2011	9:32:03 PM	Helium valve closed
11/7/2011	9:32:03 PM	H2 valve closed
11/7/2011	9:32:03 PM	BCl3 valve closed
11/7/2011	9:32:03 PM	PH3 valve closed
11/7/2011	9:32:03 PM	SiCl4 pre valve closed
11/7/2011	9:32:03 PM	SiCl4 post valve closed
11/7/2011	9:32:03 PM	Main Vac valve closed
11/7/2011	9:32:03 PM	Bypass valve closed
11/7/2011	9:32:03 PM	Bubbler valve closed
11/7/2011	9:32:03 PM	Helium MFC set to  0.000000
11/7/2011	9:32:03 PM	H2 MFC set to  0.000000
11/7/2011	9:32:03 PM	BCl3 MFC set to  0.000000
11/7/2011	9:32:03 PM	PHl3 MFC set to  0.000000
11/7/2011	9:32:03 PM	SiCl4 MFC set to  0.000000
11/7/2011	9:32:03 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	9:32:03 PM	Tube furnace set to 0
11/7/2011	9:32:04 PM	Run finished at 9:32 PM
11/7/2011	9:32:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/7/2011	9:34:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/7/2011	9:34:03 PM	Recipe started at 9:34 PM
11/7/2011	9:34:03 PM	Helium valve closed
11/7/2011	9:34:03 PM	H2 valve closed
11/7/2011	9:34:03 PM	BCl3 valve closed
11/7/2011	9:34:03 PM	PH3 valve closed
11/7/2011	9:34:03 PM	SiCl4 pre valve closed
11/7/2011	9:34:03 PM	SiCl4 post valve closed
11/7/2011	9:34:03 PM	Main Vac valve closed
11/7/2011	9:34:03 PM	Bubbler valve closed
11/7/2011	9:34:03 PM	Bypass valve opened
11/7/2011	9:34:03 PM	Helium MFC set to  0.000000
11/7/2011	9:34:03 PM	H2 MFC set to  0.000000
11/7/2011	9:34:03 PM	BCl3 MFC set to  0.000000
11/7/2011	9:34:03 PM	PHl3 MFC set to  0.000000
11/7/2011	9:34:03 PM	SiCl4 MFC set to  0.000000
11/7/2011	9:34:03 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	9:34:04 PM	Tube furnace set to 0
11/7/2011	9:35:07 PM	Helium valve closed
11/7/2011	9:35:07 PM	H2 valve closed
11/7/2011	9:35:07 PM	BCl3 valve closed
11/7/2011	9:35:07 PM	PH3 valve closed
11/7/2011	9:35:07 PM	SiCl4 pre valve closed
11/7/2011	9:35:07 PM	SiCl4 post valve closed
11/7/2011	9:35:07 PM	Main Vac valve closed
11/7/2011	9:35:07 PM	Bubbler valve closed
11/7/2011	9:35:07 PM	Bypass valve opened
11/7/2011	9:35:07 PM	Helium MFC set to  0.000000
11/7/2011	9:35:07 PM	H2 MFC set to  0.000000
11/7/2011	9:35:07 PM	BCl3 MFC set to  0.000000
11/7/2011	9:35:07 PM	PHl3 MFC set to  0.000000
11/7/2011	9:35:07 PM	SiCl4 MFC set to  0.000000
11/7/2011	9:35:07 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	9:35:07 PM	Tube furnace set to 0
11/7/2011	9:36:07 PM	Helium valve closed
11/7/2011	9:36:07 PM	H2 valve closed
11/7/2011	9:36:07 PM	BCl3 valve closed
11/7/2011	9:36:07 PM	PH3 valve closed
11/7/2011	9:36:07 PM	SiCl4 pre valve closed
11/7/2011	9:36:07 PM	SiCl4 post valve closed
11/7/2011	9:36:07 PM	Bypass valve closed
11/7/2011	9:36:07 PM	Bubbler valve closed
11/7/2011	9:36:07 PM	Main Vac valve opened
11/7/2011	9:36:07 PM	Helium MFC set to  0.000000
11/7/2011	9:36:07 PM	H2 MFC set to  0.000000
11/7/2011	9:36:07 PM	BCl3 MFC set to  0.000000
11/7/2011	9:36:07 PM	PHl3 MFC set to  0.000000
11/7/2011	9:36:07 PM	SiCl4 MFC set to  0.000000
11/7/2011	9:36:07 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	9:36:07 PM	Tube furnace set to 0
11/7/2011	9:36:08 PM	Run finished at 9:36 PM
11/7/2011	9:36:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/7/2011	9:49:10 PM	Helium MFC set to  20.000000
11/7/2011	9:49:11 PM	Helium valve opened
11/7/2011	9:50:07 PM	Helium valve closed
11/7/2011	9:52:44 PM	Helium valve opened
11/7/2011	9:53:40 PM	Helium valve closed
11/7/2011	9:55:54 PM	Main Vac valve closed
11/7/2011	9:56:13 PM	Main Vac valve opened
11/7/2011	9:56:14 PM	Helium valve opened
11/7/2011	9:57:35 PM	Recipe started at 9:57 PM
11/7/2011	9:57:35 PM	Helium valve closed
11/7/2011	9:57:35 PM	H2 valve closed
11/7/2011	9:57:35 PM	BCl3 valve closed
11/7/2011	9:57:35 PM	PH3 valve closed
11/7/2011	9:57:35 PM	SiCl4 pre valve closed
11/7/2011	9:57:35 PM	SiCl4 post valve closed
11/7/2011	9:57:35 PM	Main Vac valve closed
11/7/2011	9:57:35 PM	Bubbler valve closed
11/7/2011	9:57:35 PM	Bypass valve opened
11/7/2011	9:57:35 PM	Helium MFC set to  0.000000
11/7/2011	9:57:35 PM	H2 MFC set to  0.000000
11/7/2011	9:57:35 PM	BCl3 MFC set to  0.000000
11/7/2011	9:57:35 PM	PHl3 MFC set to  0.000000
11/7/2011	9:57:35 PM	SiCl4 MFC set to  0.000000
11/7/2011	9:57:35 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	9:57:35 PM	Tube furnace set to 0
11/7/2011	9:57:36 PM	Helium valve closed
11/7/2011	9:57:36 PM	H2 valve closed
11/7/2011	9:57:36 PM	BCl3 valve closed
11/7/2011	9:57:36 PM	PH3 valve closed
11/7/2011	9:57:36 PM	SiCl4 pre valve closed
11/7/2011	9:57:36 PM	SiCl4 post valve closed
11/7/2011	9:57:36 PM	Main Vac valve closed
11/7/2011	9:57:36 PM	Bubbler valve closed
11/7/2011	9:57:36 PM	Bypass valve opened
11/7/2011	9:57:36 PM	Helium MFC set to  0.000000
11/7/2011	9:57:36 PM	H2 MFC set to  0.000000
11/7/2011	9:57:36 PM	BCl3 MFC set to  0.000000
11/7/2011	9:57:36 PM	PHl3 MFC set to  0.000000
11/7/2011	9:57:36 PM	SiCl4 MFC set to  0.000000
11/7/2011	9:57:36 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	9:57:36 PM	Tube furnace set to 0
11/7/2011	9:57:47 PM	Helium valve closed
11/7/2011	9:57:47 PM	H2 valve closed
11/7/2011	9:57:47 PM	BCl3 valve closed
11/7/2011	9:57:47 PM	PH3 valve closed
11/7/2011	9:57:47 PM	SiCl4 pre valve closed
11/7/2011	9:57:47 PM	SiCl4 post valve closed
11/7/2011	9:57:47 PM	Bypass valve closed
11/7/2011	9:57:47 PM	Bubbler valve closed
11/7/2011	9:57:47 PM	Main Vac valve opened
11/7/2011	9:57:47 PM	Helium MFC set to  0.000000
11/7/2011	9:57:47 PM	H2 MFC set to  0.000000
11/7/2011	9:57:47 PM	BCl3 MFC set to  0.000000
11/7/2011	9:57:47 PM	PHl3 MFC set to  0.000000
11/7/2011	9:57:47 PM	SiCl4 MFC set to  0.000000
11/7/2011	9:57:47 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	9:57:47 PM	Tube furnace set to 0
11/7/2011	9:57:48 PM	Run finished at 9:57 PM
11/7/2011	9:59:52 PM	Main Vac valve closed
11/7/2011	10:00:15 PM	Main Vac valve opened
11/7/2011	10:00:46 PM	Helium MFC set to  20.000000
11/7/2011	10:00:46 PM	Helium valve opened
11/7/2011	10:00:51 PM	Tube furnace set to 50
11/7/2011	10:01:22 PM	Helium valve closed
11/7/2011	10:01:25 PM	Helium MFC set to  0.000000
11/7/2011	10:01:57 PM	Recipe started at 10:01 PM
11/7/2011	10:01:57 PM	Helium valve closed
11/7/2011	10:01:57 PM	H2 valve closed
11/7/2011	10:01:57 PM	BCl3 valve closed
11/7/2011	10:01:57 PM	PH3 valve closed
11/7/2011	10:01:57 PM	SiCl4 pre valve closed
11/7/2011	10:01:57 PM	SiCl4 post valve closed
11/7/2011	10:01:57 PM	Main Vac valve closed
11/7/2011	10:01:57 PM	Bypass valve closed
11/7/2011	10:01:57 PM	Bubbler valve closed
11/7/2011	10:01:57 PM	Helium MFC set to  0.000000
11/7/2011	10:01:57 PM	H2 MFC set to  0.000000
11/7/2011	10:01:57 PM	BCl3 MFC set to  0.000000
11/7/2011	10:01:57 PM	PHl3 MFC set to  0.000000
11/7/2011	10:01:57 PM	SiCl4 MFC set to  0.000000
11/7/2011	10:01:57 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	10:01:57 PM	Tube furnace set to 0
11/7/2011	10:02:01 PM	Helium valve closed
11/7/2011	10:02:01 PM	BCl3 valve closed
11/7/2011	10:02:01 PM	PH3 valve closed
11/7/2011	10:02:01 PM	SiCl4 pre valve closed
11/7/2011	10:02:01 PM	SiCl4 post valve closed
11/7/2011	10:02:01 PM	Main Vac valve closed
11/7/2011	10:02:01 PM	Bypass valve closed
11/7/2011	10:02:01 PM	Bubbler valve closed
11/7/2011	10:02:01 PM	H2 valve opened
11/7/2011	10:02:01 PM	Helium MFC set to  0.000000
11/7/2011	10:02:01 PM	H2 MFC set to  500.000000
11/7/2011	10:02:01 PM	BCl3 MFC set to  0.000000
11/7/2011	10:02:01 PM	PHl3 MFC set to  0.000000
11/7/2011	10:02:01 PM	SiCl4 MFC set to  0.000000
11/7/2011	10:02:01 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	10:02:01 PM	Tube furnace set to 100
11/7/2011	10:03:06 PM	Helium valve closed
11/7/2011	10:03:06 PM	BCl3 valve closed
11/7/2011	10:03:06 PM	PH3 valve closed
11/7/2011	10:03:06 PM	SiCl4 pre valve closed
11/7/2011	10:03:06 PM	SiCl4 post valve closed
11/7/2011	10:03:06 PM	Main Vac valve closed
11/7/2011	10:03:06 PM	Bypass valve closed
11/7/2011	10:03:06 PM	H2 valve opened
11/7/2011	10:03:06 PM	Bubbler valve opened
11/7/2011	10:03:06 PM	Helium MFC set to  0.000000
11/7/2011	10:03:06 PM	H2 MFC set to  500.000000
11/7/2011	10:03:06 PM	BCl3 MFC set to  0.000000
11/7/2011	10:03:06 PM	PHl3 MFC set to  0.000000
11/7/2011	10:03:06 PM	SiCl4 MFC set to  0.000000
11/7/2011	10:03:06 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	10:03:06 PM	Tube furnace set to 1000
11/7/2011	10:03:07 PM	Helium valve closed
11/7/2011	10:03:07 PM	BCl3 valve closed
11/7/2011	10:03:07 PM	PH3 valve closed
11/7/2011	10:03:07 PM	SiCl4 pre valve closed
11/7/2011	10:03:07 PM	SiCl4 post valve closed
11/7/2011	10:03:07 PM	Main Vac valve closed
11/7/2011	10:03:07 PM	Bypass valve closed
11/7/2011	10:03:07 PM	H2 valve opened
11/7/2011	10:03:07 PM	Bubbler valve opened
11/7/2011	10:03:07 PM	Helium MFC set to  0.000000
11/7/2011	10:03:07 PM	H2 MFC set to  450.000000
11/7/2011	10:03:07 PM	BCl3 MFC set to  0.000000
11/7/2011	10:03:07 PM	PHl3 MFC set to  0.000000
11/7/2011	10:03:07 PM	SiCl4 MFC set to  0.000000
11/7/2011	10:03:07 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	10:03:07 PM	Tube furnace set to 1000
11/7/2011	10:25:07 PM	Helium valve closed
11/7/2011	10:25:07 PM	PH3 valve closed
11/7/2011	10:25:07 PM	Main Vac valve closed
11/7/2011	10:25:07 PM	Bypass valve closed
11/7/2011	10:25:07 PM	H2 valve opened
11/7/2011	10:25:07 PM	BCl3 valve opened
11/7/2011	10:25:07 PM	SiCl4 pre valve opened
11/7/2011	10:25:07 PM	SiCl4 post valve opened
11/7/2011	10:25:07 PM	Bubbler valve opened
11/7/2011	10:25:07 PM	Helium MFC set to  0.000000
11/7/2011	10:25:07 PM	H2 MFC set to  500.000000
11/7/2011	10:25:07 PM	BCl3 MFC set to  0.600000
11/7/2011	10:25:07 PM	PHl3 MFC set to  0.000000
11/7/2011	10:25:07 PM	SiCl4 MFC set to  17.500000
11/7/2011	10:25:07 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	10:25:07 PM	Tube furnace set to 1000
11/7/2011	10:46:07 PM	Helium valve closed
11/7/2011	10:46:07 PM	BCl3 valve closed
11/7/2011	10:46:07 PM	PH3 valve closed
11/7/2011	10:46:07 PM	SiCl4 pre valve closed
11/7/2011	10:46:07 PM	SiCl4 post valve closed
11/7/2011	10:46:07 PM	Main Vac valve closed
11/7/2011	10:46:07 PM	Bypass valve closed
11/7/2011	10:46:07 PM	H2 valve opened
11/7/2011	10:46:07 PM	Bubbler valve opened
11/7/2011	10:46:07 PM	Helium MFC set to  0.000000
11/7/2011	10:46:07 PM	H2 MFC set to  450.000000
11/7/2011	10:46:07 PM	BCl3 MFC set to  0.000000
11/7/2011	10:46:07 PM	PHl3 MFC set to  0.000000
11/7/2011	10:46:07 PM	SiCl4 MFC set to  0.000000
11/7/2011	10:46:07 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	10:46:07 PM	Tube furnace set to 750
11/7/2011	10:56:07 PM	H2 valve closed
11/7/2011	10:56:07 PM	BCl3 valve closed
11/7/2011	10:56:07 PM	PH3 valve closed
11/7/2011	10:56:07 PM	SiCl4 pre valve closed
11/7/2011	10:56:07 PM	SiCl4 post valve closed
11/7/2011	10:56:07 PM	Main Vac valve closed
11/7/2011	10:56:07 PM	Bypass valve closed
11/7/2011	10:56:07 PM	Helium valve opened
11/7/2011	10:56:07 PM	Bubbler valve opened
11/7/2011	10:56:07 PM	Helium MFC set to  400.000000
11/7/2011	10:56:07 PM	H2 MFC set to  0.000000
11/7/2011	10:56:07 PM	BCl3 MFC set to  0.000000
11/7/2011	10:56:07 PM	PHl3 MFC set to  0.000000
11/7/2011	10:56:07 PM	SiCl4 MFC set to  0.000000
11/7/2011	10:56:07 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	10:56:08 PM	Tube furnace set to 0
11/7/2011	11:26:08 PM	Helium valve closed
11/7/2011	11:26:08 PM	H2 valve closed
11/7/2011	11:26:08 PM	BCl3 valve closed
11/7/2011	11:26:08 PM	PH3 valve closed
11/7/2011	11:26:08 PM	SiCl4 pre valve closed
11/7/2011	11:26:08 PM	SiCl4 post valve closed
11/7/2011	11:26:08 PM	Main Vac valve closed
11/7/2011	11:26:08 PM	Bypass valve closed
11/7/2011	11:26:08 PM	Bubbler valve closed
11/7/2011	11:26:08 PM	Helium MFC set to  0.000000
11/7/2011	11:26:08 PM	H2 MFC set to  0.000000
11/7/2011	11:26:08 PM	BCl3 MFC set to  0.000000
11/7/2011	11:26:08 PM	PHl3 MFC set to  0.000000
11/7/2011	11:26:08 PM	SiCl4 MFC set to  0.000000
11/7/2011	11:26:08 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:26:08 PM	Tube furnace set to 0
11/7/2011	11:31:08 PM	Helium valve closed
11/7/2011	11:31:08 PM	H2 valve closed
11/7/2011	11:31:08 PM	BCl3 valve closed
11/7/2011	11:31:08 PM	PH3 valve closed
11/7/2011	11:31:08 PM	SiCl4 pre valve closed
11/7/2011	11:31:08 PM	SiCl4 post valve closed
11/7/2011	11:31:08 PM	Main Vac valve closed
11/7/2011	11:31:08 PM	Bubbler valve closed
11/7/2011	11:31:08 PM	Bypass valve opened
11/7/2011	11:31:08 PM	Helium MFC set to  0.000000
11/7/2011	11:31:08 PM	H2 MFC set to  0.000000
11/7/2011	11:31:08 PM	BCl3 MFC set to  0.000000
11/7/2011	11:31:08 PM	PHl3 MFC set to  0.000000
11/7/2011	11:31:08 PM	SiCl4 MFC set to  0.000000
11/7/2011	11:31:08 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:31:08 PM	Tube furnace set to 0
11/7/2011	11:32:05 PM	Helium valve closed
11/7/2011	11:32:05 PM	H2 valve closed
11/7/2011	11:32:05 PM	BCl3 valve closed
11/7/2011	11:32:05 PM	PH3 valve closed
11/7/2011	11:32:05 PM	SiCl4 pre valve closed
11/7/2011	11:32:05 PM	SiCl4 post valve closed
11/7/2011	11:32:05 PM	Main Vac valve closed
11/7/2011	11:32:05 PM	Bubbler valve closed
11/7/2011	11:32:05 PM	Bypass valve opened
11/7/2011	11:32:05 PM	Helium MFC set to  0.000000
11/7/2011	11:32:05 PM	H2 MFC set to  0.000000
11/7/2011	11:32:05 PM	BCl3 MFC set to  0.000000
11/7/2011	11:32:05 PM	PHl3 MFC set to  0.000000
11/7/2011	11:32:05 PM	SiCl4 MFC set to  0.000000
11/7/2011	11:32:05 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:32:05 PM	Tube furnace set to 0
11/7/2011	11:35:05 PM	Helium valve closed
11/7/2011	11:35:05 PM	H2 valve closed
11/7/2011	11:35:05 PM	BCl3 valve closed
11/7/2011	11:35:05 PM	PH3 valve closed
11/7/2011	11:35:05 PM	SiCl4 pre valve closed
11/7/2011	11:35:05 PM	SiCl4 post valve closed
11/7/2011	11:35:05 PM	Bypass valve closed
11/7/2011	11:35:05 PM	Bubbler valve closed
11/7/2011	11:35:05 PM	Main Vac valve opened
11/7/2011	11:35:05 PM	Helium MFC set to  0.000000
11/7/2011	11:35:05 PM	H2 MFC set to  0.000000
11/7/2011	11:35:05 PM	BCl3 MFC set to  0.000000
11/7/2011	11:35:05 PM	PHl3 MFC set to  0.000000
11/7/2011	11:35:05 PM	SiCl4 MFC set to  0.000000
11/7/2011	11:35:05 PM	Bypass solenoid MFC set to  0.000000
11/7/2011	11:35:05 PM	Tube furnace set to 0
11/7/2011	11:35:06 PM	Run finished at 11:35 PM
